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1. WO2011098930 - ACCELEROMETER AND PRODUCTION METHOD

Publication Number WO/2011/098930
Publication Date 18.08.2011
International Application No. PCT/IB2011/050320
International Filing Date 25.01.2011
IPC
G01P 15/125 2006.01
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces
08with conversion into electric or magnetic values
125by capacitive pick-up
G01P 15/18 2006.01
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
18in two or more dimensions
G01P 15/08 2006.01
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces
08with conversion into electric or magnetic values
CPC
G01P 15/0802
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
0802Details
G01P 15/125
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
125by capacitive pick-up
G01P 2015/084
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
0805being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
0822for defining out-of-plane movement of the mass
084the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
H04R 19/005
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
19Electrostatic transducers
005using semiconductor materials
Applicants
  • NXP B.V [NL]/[NL] (AllExceptUS)
  • LANGEREIS, Geert [NL]/[NL] (UsOnly)
  • BOMINAAR-SILKENS, Iris [NL]/[NL] (UsOnly)
  • VAN LIPPEN, Twan [NL]/[NL] (UsOnly)
Inventors
  • LANGEREIS, Geert
  • BOMINAAR-SILKENS, Iris
  • VAN LIPPEN, Twan
Agents
  • WILLIAMSON, Paul, L,
Priority Data
10153512.812.02.2010EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) ACCELEROMETER AND PRODUCTION METHOD
(FR) ACCÉLÉROMÈTRE ET PROCÉDÉ DE PRODUCTION
Abstract
(EN)
A MEMS accelerometer uses capacitive sensing between two electrode layers. One of the electrode layers has at least four independent electrodes arranged as two pairs of electrodes, with one pair aligned orthogonally to the other such that tilting of the membrane can be detected as well as normal- direction movement of the membrane. In this way, a three axis accelerometer can be formed from a single suspended mass, and by sensing using a set of capacitor electrodes which are all in the same plane. This means the fabrication is simple and is compatible with other MEMS manufacturing processes, such as MEMS microphones.
(FR)
L'invention concerne un accéléromètre à MEMS basé sur une détection capacitive entre deux couches d'électrodes. Une des couches d'électrodes comprend au moins quatre électrodes indépendantes regroupées en deux paires d'électrodes, une paire étant orthogonale à l'autre paire, de sorte que l'inclinaison de la membrane peut être détectée ainsi qu'un mouvement de la membrane dans la direction normale. De cette manière, un accéléromètre à trois axes peut être formé à partir d'une unique masse en suspension, et en effectuant la détection au moyen d'un groupe d'électrodes capacitives se trouvant toutes dans le même plan. Ceci signifie que la fabrication est simple et compatible avec d'autres procédés de fabrication de MEMS, comme les microphones à MEMS.
Also published as
Latest bibliographic data on file with the International Bureau