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1. WO2011062450 - SPUTTERING TARGET OF MULTI-COMPONENT SINGLE BODY AND METHOD FOR PREPARATION THEREOF, AND METHOD FOR PRODUCING MULTI-COMPONENT ALLOY-BASED NANOSTRUCTURED THIN FILMS USING SAME

Available information on National Phase entries(more information)
OfficeEntry DateNational NumberNational Status
Japan 17.05.20122012539818
United States of America 18.05.201213510708Published: 04.10.2012