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1. WO2011048149 - METHOD OF PRODUCING POROUS METAL OXIDE FILMS USING TEMPLATE ASSISTED ELECTROSTATIC SPRAY DEPOSITION

Publication Number WO/2011/048149
Publication Date 28.04.2011
International Application No. PCT/EP2010/065803
International Filing Date 20.10.2010
IPC
C23C 18/12 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
18Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
02by thermal decomposition
12characterised by the deposition of inorganic material other than metallic material
CPC
C23C 18/1216
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
18Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
02by thermal decomposition
12characterised by the deposition of inorganic material other than metallic material
1204inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
1208Oxides, e.g. ceramics
1216Metal oxides
C23C 18/1241
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
18Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
02by thermal decomposition
12characterised by the deposition of inorganic material other than metallic material
1229Composition of the substrate
1241Metallic substrates
C23C 18/1254
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
18Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
02by thermal decomposition
12characterised by the deposition of inorganic material other than metallic material
125Process of deposition of the inorganic material
1254Sol or sol-gel processing
C23C 18/1279
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
18Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
02by thermal decomposition
12characterised by the deposition of inorganic material other than metallic material
125Process of deposition of the inorganic material
1279performed under reactive atmosphere, e.g. oxidising or reducing atmospheres
C23C 18/1283
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
18Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
02by thermal decomposition
12characterised by the deposition of inorganic material other than metallic material
125Process of deposition of the inorganic material
1283Control of temperature, e.g. gradual temperature increase, modulation of temperature
Y10T 428/24997
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
428Stock material or miscellaneous articles
249921Web or sheet containing structurally defined element or component
249953Composite having voids in a component [e.g., porous, cellular, etc.]
249967Inorganic matrix in void-containing component
24997Of metal-containing material
Applicants
  • TECHNISCHE UNIVERSITÄT BERLIN [DE]/[DE] (AllExceptUS)
  • PAUL, Benjamin [DE]/[DE] (UsOnly)
  • SOKOLOV, Sergey [US]/[DE] (UsOnly)
  • KRAEHNERT, Ralph [DE]/[DE] (UsOnly)
Inventors
  • PAUL, Benjamin
  • SOKOLOV, Sergey
  • KRAEHNERT, Ralph
Agents
  • ZIEBIG, Marlene K.
Priority Data
09173505.020.10.2009EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHOD OF PRODUCING POROUS METAL OXIDE FILMS USING TEMPLATE ASSISTED ELECTROSTATIC SPRAY DEPOSITION
(FR) PROCÉDÉ DE PRODUCTION DE COUCHES POREUSES D'OXYDE MÉTALLIQUE PAR DÉPÔT PAR PULVÉRISATION ÉLECTROSTATIQUE ASSISTÉ PAR GABARIT
Abstract
(EN)
The present invention relates to a method of producing porous metal oxide films on a substrate using template assisted electrostatic spray deposition (ESD).Thereby it is possible to produce both mesoporous and macroporous films which have a predefined pore morphology. In addition hierarchically structured meso-and macroporous films can be produced. The present invention also concerns the produced porous films and their use in catalysis, power storage, sensing and compound separation.
(FR)
La présente invention concerne un procédé de production de couches poreuses d'oxyde métallique sur un substrat par dépôt par pulvérisation électrostatique (ESD) assisté par gabarit. Ledit procédé permet de produire des couches mésoporeuses et macroporeuses ayant une morphologie du pore prédéfinie. De plus, la présente invention permet de produire des couches méso- et macroporeuses structurées de manière hiérarchisée. La présente invention concerne également les couches poreuses ainsi produites et leur utilisation dans la catalyse, le stockage d'énergie, la détection et la séparation de composés.
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