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1. WO2011033097 - METHODS AND SYSTEMS FOR TOMOGRAPHIC RECONSTRUCTION OF COHERENT RADIATION IMAGES

Publication Number WO/2011/033097
Publication Date 24.03.2011
International Application No. PCT/EP2010/063768
International Filing Date 20.09.2010
IPC
G06T 11/00 2006.01
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
112D image generation
H01J 37/22 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
22Optical or photographic arrangements associated with the tube
CPC
G06T 11/006
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
112D [Two Dimensional] image generation
003Reconstruction from projections, e.g. tomography
006Inverse problem, transformation from projection-space into object-space, e.g. transform methods, back-projection, algebraic methods
H01J 2237/226
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
22Treatment of data
226Image reconstruction
H01J 2237/2611
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
26Electron or ion microscopes
2611Stereoscopic measurements and/or imaging
H01J 37/222
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
22Optical or photographic arrangements associated with the tube
222Image processing arrangements associated with the tube
H01J 37/26
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26Electron or ion microscopes; Electron or ion diffraction tubes
Applicants
  • UNIVERSITEIT ANTWERPEN [BE]/[BE] (AllExceptUS)
  • VAN DYCK, Dirk [BE]/[BE] (UsOnly)
Inventors
  • VAN DYCK, Dirk
Agents
  • WAUTERS, Davy
Priority Data
09170779.420.09.2009EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHODS AND SYSTEMS FOR TOMOGRAPHIC RECONSTRUCTION OF COHERENT RADIATION IMAGES
(FR) PROCÉDÉS ET SYSTÈMES DE RECONSTRUCTION TOMOGRAPHIQUE D'IMAGES DE RAYONNEMENT COHÉRENT
Abstract
(EN)
A method and system are described for reconstructing a coherent radiation tomographic image of at least one object. The method comprises performing back-projection, whereby performing back-projection comprises taking into account propagation waves from the point of interaction to a plane of detection. Furthermore a method is described for studying objects, wherein a plurality of objects are imaged on a substrate using coherent radiation tomography and whereby the method as described above is used for characterizing the objects.
(FR)
L'invention porte sur un procédé et un système de reconstruction d'une image tomographique de rayonnement cohérent d'au moins un objet. Le procédé comprend la réalisation d'une rétroprojection, la réalisation de la rétroprojection comprenant une prise en considération d'ondes de propagation du point d'interaction à un plan de détection. L'invention porte en outre sur un procédé d'étude d'objets, dans lequel une pluralité d'objets est soumise à une imagerie sur un substrat à l'aide d'une tomographie par rayonnement cohérent, le procédé décrit plus haut étant utilisé pour caractériser les objets.
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