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1. WO2011032947 - PINCH ROLL, DEVICE, AND METHOD FOR REMOVING A FILM FROM A DISC-SHAPED WORKPIECE

Publication Number WO/2011/032947
Publication Date 24.03.2011
International Application No. PCT/EP2010/063486
International Filing Date 14.09.2010
Chapter 2 Demand Filed 15.07.2011
IPC
H01L 21/00 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
CPC
H01L 21/67132
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67011Apparatus for manufacture or treatment
67132Apparatus for placing on an insulating substrate, e.g. tape
Y10T 156/1132
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
156Adhesive bonding and miscellaneous chemical manufacture
11Methods of delaminating, per se; i.e. , separating at bonding face
1126Using direct fluid current against work during delaminating
1132Using vacuum directly against work during delaminating
Y10T 156/1911
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
156Adhesive bonding and miscellaneous chemical manufacture
19Delaminating means
1911Heating or cooling delaminating means [e.g., melting means, freezing means, etc.]
Y10T 156/1944
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
156Adhesive bonding and miscellaneous chemical manufacture
19Delaminating means
1928Differential fluid pressure delaminating means
1944Vacuum delaminating means [e.g., vacuum chamber, etc.]
Applicants
  • ERS ELECTRONIC GMBH [DE]/[DE] (AllExceptUS)
  • SCHINDLER, Rüdiger [DE]/[DE] (UsOnly)
Inventors
  • SCHINDLER, Rüdiger
Agents
  • BARTH, Stephan
Priority Data
10 2009 041 294.815.09.2009DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) ABZIEHROLLE, VORRICHTUNG UND VERFAHREN ZUM ABLÖSEN EINER FOLIE VON EINEM SCHEIBENFÖRMIGEN WERKSTÜCK
(EN) PINCH ROLL, DEVICE, AND METHOD FOR REMOVING A FILM FROM A DISC-SHAPED WORKPIECE
(FR) ROULEAU DE DÉCOLLEMENT, DISPOSITIF ET PROCÉDÉ PERMETTANT LE DÉCOLLEMENT D'UN FILM D'UNE PIÈCE EN FORME DE DISQUE
Abstract
(DE)
Die vorliegende Erfindung schafft eine Abziehrolle (12) zum Ablösen einer Folie (2) von einem scheibenförmigen Werkstück (3), insbesondere einem Mold-Wafer (3), mit einem Folienmanipulierabschnitt (13) zum kraftschlüssigen Aufnehmen oder zum Abstoßen eines Abschnittes (14) der Folie (2). Die vorliegende Erfindung schafft ferner eine Vorrichtung (1) zum Ablösen einer Folie (2) von einem scheibenförmigen Werkstück (3), insbesondere einem Mold-Wafer (3), mit: einer Festspanneinrichtung (4) zum kraftschlüssigen Festspannen des scheibenförmigen Werkstücks (3); einer derartigen Abziehrolle (12); einer Verfahreinrichtung (17) zum Verfahren der Abziehrolle (12) horizontal und/oder vertikal zu einer Oberfläche (10) der Fest Spanneinrichtung (4); und einer Rotiereinrichtung (24) zum Rotieren der Abziehrolle (12) um eine Mittelachse (25) der Abziehrolle (12). Die vorliegende Erfindung schafft noch ferner ein Verfahren zum Ablösen einer Folie (2) von einem scheibenförmigen Werkstück (3), insbesondere einem MoId-Wafer (3), mittels einer derartigen Vorrichtung (1).
(EN)
The present invention relates to a pinch roll (12) for removing a film (2) from a disc-shaped workpiece (3), in particular a mold wafer (3), comprising a film manipulation section (13) for receiving or pushing off a section (14) of the film (2) in a force-locked manner. The present invention further relates to a device (1) for removing a film (2) from a disc-shaped workpiece (3), in particular a mold wafer (3), comprising: a clamping unit (4) for clamping the disc-shaped workpiece (3) in a force-locked manner; such a pinch roll (12); a displacement unit (17) for displacing the pinch roll (12) horizontally or vertically to a surface (10) of the clamping unit (4); and a rotating unit (24) for rotating the pinch roll (12) about a center axis (25) of the pinch roll (12). The present invention further relates to a method for removing a film (2) from a disc-shaped workpiece (3), in particular a mold wafer (3), by means of such a device (1).
(FR)
L'invention concerne un rouleau de décollement (12) destiné à décoller un film (2) d'une pièce en forme de disque (3), en particulier, d'une tranche semi-conductrice moulée (3), comprenant une section de manipulation de film (13) pour la réception, par transmission de force ou pour l'éjection d'une section (14) du film (3). L'invention concerne en outre un dispositif (1) pour le décollement d'un film (2) d'une pièce en forme de disque (3), en particulier d'une tranche semi-conductrice moulée (3), comprenant : un dispositif de serrage (4) pour le serrage, par transmission de force, de la pièce en forme de disque (3); un rouleau de décollement (12) du type précité; un dispositif de déplacement (17) pour le déplacement du rouleau de décollement (12), horizontalement et/ou verticalement, par rapport à une surface (10) du dispositif de serrage (4); et un dispositif de rotation (24), pour la rotation du rouleau de décollement (12) autour d'un axe médian (25) du rouleau de décollement (12). L'invention concerne en outre un procédé de décollement d'un film (2), d'une pièce en forme de disque (3), en particulier d'une tranche semi-conductrice moulée (3) au moyen du dispositif précité (1).
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