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1. (WO2011024689) PEELING DEVICE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2011/024689 International Application No.: PCT/JP2010/063946
Publication Date: 03.03.2011 International Filing Date: 18.08.2010
IPC:
B65H 41/00 (2006.01) ,H01L 21/683 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
H
HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
41
Machines for separating superposed webs
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
Applicants:
旭硝子株式会社 Asahi Glass Company, Limited. [JP/JP]; 東京都千代田区有楽町一丁目12番1号 12-1, Yurakucho 1-chome, Chiyoda-ku, Tokyo 1008405, JP (AllExceptUS)
江畑 研一 EBATA Kenichi [JP/JP]; JP (UsOnly)
伊藤 泰則 ITO Yasunori [JP/JP]; JP (UsOnly)
Inventors:
江畑 研一 EBATA Kenichi; JP
伊藤 泰則 ITO Yasunori; JP
Agent:
小栗 昌平 OGURI Shohei; 東京都港区西新橋一丁目7番13号 虎ノ門イーストビルディング10階 栄光特許事務所 Eikoh Patent Firm, Toranomon East Bldg. 10F, 7-13, Nishi-Shimbashi 1-chome, Minato-ku, Tokyo 1050003, JP
Priority Data:
2009-20091431.08.2009JP
Title (EN) PEELING DEVICE
(FR) DISPOSITIF DE DÉTACHEMENT
(JA) 剥離装置
Abstract:
(EN) A peeling device for peeling off a reinforcing sheet adhered to a substrate, the peeling device comprising: a support unit for supporting one main surface of a laminated body including the substrate and the reinforcing sheet; a plate-like flexible member mounted to the other main surface of the laminated body; pads affixed to the surface of the flexible member which is located on the opposite side of the flexible member from the laminated body; rods each connected to any of the pads; drive devices which each move each of the rods in the axial direction thereof; and a control device for controlling the position of each of the rods. The pads are each connected to any of the rods through any of joints, and the pad is adapted to be pivotable about a position near the intersection between the centerline of the rod to which the pad is connected and the surface of the reinforcing sheet which faces the substrate or the surface of the substrate which faces the reinforcing sheet. The peeling device is configured in such a manner that the support unit supports said main surface of the laminated body and the control device controls the positions of the rods so that the other main surface of the laminated body is sequentially deformed and bent from the one end side thereof.
(FR) La présente invention se rapporte à un dispositif de détachement destiné à détacher une feuille de renforcement adhérant à un substrat, le dispositif de détachement comprenant : une unité de support destinée à supporter une surface principale d'un corps stratifié comprenant le substrat et la feuille de renforcement ; un élément flexible du type plaque monté sur l'autre surface principale du corps stratifié ; des pastilles fixées à la surface de l'élément flexible qui se situe sur le côté opposé de l'élément flexible depuis le corps stratifié ; des tiges reliées chacune à n'importe laquelle des pastilles ; des dispositifs d'entraînement qui déplacent chacun chacune des tiges dans la direction axiale de celles-ci ; et un dispositif de commande destiné à commander la position de chacune des tiges. Les pastilles sont chacune reliées à n'importe laquelle des tiges par n'importe quel type de joints, et la pastille est conçue pour pouvoir pivoter autour d'une position proche de l'intersection entre la ligne centrale de la tige à laquelle est reliée la pastille et la surface de la feuille de renforcement qui fait face au substrat ou la surface du substrat qui fait face à la feuille de renforcement. Le dispositif de détachement est conçu d'une manière telle que l'unité de support supporte ladite surface principale du corps stratifié et que le dispositif de commande commande les positions des tiges de sorte que l'autre surface principale du corps stratifié se déforme et se courbe séquentiellement depuis son premier côté d'extrémité.
(JA)  本発明は、基板に貼り付けられた補強シートを剥離する剥離装置において、前記基板及び前記補強シートを含む積層体の一方の主面を支持する支持ユニットと、前記積層体の他方の主面に取付けられる板状の可撓性部材と、前記可撓性部材上の前記積層体側と反対側の面に固定された複数のパッドと、前記複数のパッドのいずれかに連結された複数のロッドと、前記複数のロッドをロッド毎にロッドの軸方向に移動させるための複数の駆動装置と、前記複数のロッドの位置をロッド毎に制御する制御装置とを備え、前記複数のパッドは、複数の継手のいずれかを介して、前記複数のロッドのいずれかに連結され、前記連結されたロッドの中心線と、前記補強シート上の前記基板側の面又は前記基板上の前記補強シート側の面との交点近傍を中心として回動可能とされており、前記支持ユニットにより前記積層体の一方の主面を支持すると共に、前記積層体の他方の主面が一端側から順次撓み変形するように前記制御装置により前記複数のロッドの位置を制御する剥離装置に関する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)