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1. (WO2011013936) ROLL-TO-ROLL SPUTTER SYSTEM COMPRISING A PLURALITY OF CHAMBERS, AND METHOD FOR USING SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2011/013936    International Application No.:    PCT/KR2010/004756
Publication Date: 03.02.2011 International Filing Date: 21.07.2010
IPC:
H01L 21/203 (2006.01), C23C 14/34 (2006.01)
Applicants: Z. TEC. CO.LTD [KR/KR]; 234, Busang-ri, Nam-myeon, Gimcheon-si Gyeongsangbuk-do 730-030 (KR) (For All Designated States Except US).
KIM, Bong Sueg [KR/KR]; (KR) (For US Only).
KIM, Kyoung Hun [KR/KR]; (KR) (For US Only).
KIM, Dong Ju [KR/KR]; (KR) (For US Only)
Inventors: KIM, Bong Sueg; (KR).
KIM, Kyoung Hun; (KR).
KIM, Dong Ju; (KR)
Agent: LEE, Cheol Hee; Guardian International Patent & Law Office 2F, Woo Kyeong Bldg., 156-13 Samseong-dong, Kangnam-ku Seoul 135-090 (KR)
Priority Data:
10-2009-0068865 28.07.2009 KR
Title (EN) ROLL-TO-ROLL SPUTTER SYSTEM COMPRISING A PLURALITY OF CHAMBERS, AND METHOD FOR USING SAME
(FR) SYSTÈME DE PULVÉRISATION ROULEAU À ROULEAU COMPRENANT UNE PLURALITÉ DE CHAMBRES ET PROCÉDÉ D'UTILISATION CORRESPONDANT
(KO) 복수의 챔버를 구비한 롤-투-롤 스퍼터 시스템 및 그 사용방법
Abstract: front page image
(EN)The technical features of the present invention are intended for a roll-to-roll sputter system comprising a plurality of chambers including: a first chamber (100A) for performing a first process; and a second chamber (100B) for performing a second process following the first process. The first chamber and the second chamber are connected to each other through a roller connection portion (150) in such a manner that the first chamber and the second chamber face each other.
(FR)Les caractéristiques technique de la présente invention sont destinées à un système de pulvérisation rouleau à rouleau comprenant une pluralité de chambres comprenant: une première chambre (100A) servant à un premier traitement; et une seconde chambre (100B) servant à un second traitement qui fait suite au premier traitement. La première chambre et la seconde chambre sont reliées l'une à l'autre par une partie de liaison de rouleau (150) de telle sorte que la première chambre et la seconde chambre se situent en face l'une de l'autre.
(KO)본원 발명의 복수의 챔버를 구비한 롤-투-롤 스퍼터 시스템은 롤-투-롤(Roll-to-Roll) 스퍼터 시스템에 있어서, 제1 공정을 실시하는 제1 챔버(100A); 및 상기 제1 공정의 후속 공정인 제2 공정을 실시하는 제2 챔버(100B)를 구비하되, 상기 제1 챔버와 상기 제2 챔버는 롤러 연결부(150)를 통해 서로 대향하여 연결되어 있는 복수의 챔버를 구비한 롤-투-롤(Roll-to-Roll) 스퍼터 시스템을 제공함에 기술적 특징이 있다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)