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1. WO2011006885 - NEMS COMPRISING ALSI ALLOY BASED TRANSDUCTION MEANS

Publication Number WO/2011/006885
Publication Date 20.01.2011
International Application No. PCT/EP2010/060033
International Filing Date 13.07.2010
IPC
G01L 1/18 2006.01
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
1Measuring force or stress, in general
18using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
B81B 3/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
CPC
B81B 2203/0118
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2203Basic microelectromechanical structures
01Suspended structures, i.e. structures allowing a movement
0118Cantilevers
B81B 2203/058
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2203Basic microelectromechanical structures
05Type of movement
058Rotation out of a plane parallel to the substrate
B81B 3/0021
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
0021Transducers for transforming electrical into mechanical energy or vice versa
G01N 2291/014
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2291Indexing codes associated with group G01N29/00
01Indexing codes associated with the measuring variable
014Resonance or resonant frequency
G01N 2291/0427
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2291Indexing codes associated with group G01N29/00
04Wave modes and trajectories
042Wave modes
0427Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
G01N 29/022
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
02Analysing fluids
022Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
Applicants
  • COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES [FR]/[FR] (AllExceptUS)
  • CALIFORNIA INSTITUTE OF TECHNOLOGY [US]/[US] (AllExceptUS)
  • ANDREUCCI, Philippe [FR]/[FR] (UsOnly)
  • DURAFFOURG, Laurent [FR]/[FR] (UsOnly)
  • MARCOUX, Carine [FR]/[FR] (UsOnly)
  • BRIANCEAU, Pierre [FR]/[FR] (UsOnly)
  • HENTZ, Sébastien [FR]/[FR] (UsOnly)
  • MINORET, Stéphane [FR]/[FR] (UsOnly)
  • MYERS, Edward [US]/[US] (UsOnly)
  • ROUKES, Michael [US]/[US] (UsOnly)
Inventors
  • ANDREUCCI, Philippe
  • DURAFFOURG, Laurent
  • MARCOUX, Carine
  • BRIANCEAU, Pierre
  • HENTZ, Sébastien
  • MINORET, Stéphane
  • MYERS, Edward
  • ROUKES, Michael
Agents
  • ILGART, Jean-Christophe
Priority Data
09 5499817.07.2009FR
61/226,41917.09.2009US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) NEMS COMPRISING ALSI ALLOY BASED TRANSDUCTION MEANS
(FR) SYSTÈME NANOÉLECTROMÉCANIQUE COMPORTANT UN MOYEN DE TRANSDUCTION À BASE D'ALLIAGE ALSI
Abstract
(EN)
The invention relates to a nano electro- mechanical system (NEMS) formed on a substrate (21) and comprising at least one fixed part associated with the substrate and at least one movable part (23) in relation to the substrate, said system comprising transduction means (24) capable of exciting the movable part to confer on it a movement and/or to detect a movement of the movable part, the transduction means comprising at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, said deposition being supported at least in part by the movable part of the system.
(FR)
L'invention concerne un système nanoélectromécanique (NEMS) formé sur un substrat (21) et qui comporte au moins une partie fixe associée au substrat et au moins une partie mobile (23) en relation avec le substrat, ledit système comportant un moyen de transduction (24) pouvant exciter la partie mobile de façon à lui communiquer un mouvement et/ou à détecter un mouvement de la partie mobile, le moyen de transduction comportant au moins un matériau électriquement conducteur. Le matériau électriquement conducteur est obtenu à l'aide d'un dépôt à base d'alliage AlSi, ledit dépôt étant porté au moins en partie par la partie mobile du système.
Also published as
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