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1. WO2011004113 - DEVICE FOR MEASURING PRESSURE, AND METHOD FOR MANUFACTURING SAME

Publication Number WO/2011/004113
Publication Date 13.01.2011
International Application No. PCT/FR2010/051415
International Filing Date 05.07.2010
IPC
G01L 9/00 2006.01
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
CPC
G01L 9/0072
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0072using variations in capacitance
G01L 9/0073
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0072using variations in capacitance
0073using a semiconductive diaphragm
Applicants
  • TRONIC'S MICROSYSTEMS [FR]/[FR] (AllExceptUS)
  • LECLERC, Jacques [FR]/[FR] (UsOnly)
Inventors
  • LECLERC, Jacques
Agents
  • PALIX, Stéphane
Priority Data
095466706.07.2009FR
61/224,58110.07.2009US
Publication Language French (FR)
Filing Language French (FR)
Designated States
Title
(EN) DEVICE FOR MEASURING PRESSURE, AND METHOD FOR MANUFACTURING SAME
(FR) DISPOSITIF DE MESURE DE PRESSION ET SON PROCÉDÉ DE FABRICATION
Abstract
(EN)
The invention relates to a device for measuring pressure through the capacitive effect between two electrodes, including at least one sensitive electrode (11) spaced apart from and opposite a stationary electrode (211) so as to define a cavity (4) in which a reference pressure (Pref) exists. The device according to the invention further includes a protective housing (1) for insulating at least the stationary electrode from the ambient environment in which the pressure (P) to be measured exists, said housing (1) having at least one solid portion, forming a recess (10) for containing at least the stationary electrode (211), and a thinned portion forming the sensitive electrode (11).
(FR)
Dispositif de mesure de pression par effet capacitif entre deux électrodes comprenant au moins une électrode sensible (11) disposée en regard et à distance d'une électrode fixe (211) de manière à délimiter une cavité (4) dans laquelle règne une pression de référence (Pref). Le dispositif selon l'invention comprend en outre un boîtier (1) de protection destiné à isoler au moins l'électrode fixe de l'environnement ambiant dans lequel règne la pression à mesurer (P), ledit boîtier (1) présentant au moins une partie massive formant logement (10) destiné à contenir au moins l'électrode fixe (211), et une partie amincie formant l'électrode sensible (11).
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