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1. WO2011002662 - THERMAL FLOW SENSOR WITH ZERO DRIFT COMPENSATIONS

Publication Number WO/2011/002662
Publication Date 06.01.2011
International Application No. PCT/US2010/039848
International Filing Date 24.06.2010
IPC
G01F 1/68 2006.01
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW, OR LIQUID LEVEL; METERING BY VOLUME
1Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
68by using thermal effects
CPC
G01F 1/6842
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
1Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
68by using thermal effects
684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
6842with means for influencing the fluid flow
G01F 1/6847
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
1Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
68by using thermal effects
684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
6847where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
G01F 5/00
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
5Measuring a proportion of the volume flow
Y10T 137/0324
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
137Fluid handling
0318Processes
0324With control of flow by a condition or characteristic of a fluid
Y10T 137/7737
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
137Fluid handling
7722Line condition change responsive valves
7737Thermal responsive
Y10T 137/7759
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
137Fluid handling
7722Line condition change responsive valves
7758Pilot or servo controlled
7759Responsive to change in rate of fluid flow
Applicants
  • ADVANCED ENERGY INDUSTRIES, INC. [US]/[US] (AllExceptUS)
  • SMIRNOV, Alexei, V. [US]/[US] (UsOnly)
Inventors
  • SMIRNOV, Alexei, V.
Agents
  • O'DOWD, Sean, R.
Priority Data
12/494,97030.06.2009US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) THERMAL FLOW SENSOR WITH ZERO DRIFT COMPENSATIONS
(FR) DÉTECTEUR DE FLUX THERMIQUE AVEC COMPENSATIONS DE DÉRIVE DU ZÉRO
Abstract
(EN)
One embodiment of the present invention comprises a thermal flow sensor having a first capillary tube coupled to a mass flow controller main flow line across a mass flow controller bypass. A first pair of sensing elements is coupled to the first capillary tube. The thermal sensor also comprise a second capillary tube having a substantially similar cross-sectional area to the first capillary tube, a first end thermally coupled to one of a mass flow controller base and the first tube proximal the first tube inlet port, and a second end thermally coupled to one of the mass flow controller base and the first tube proximal the outlet port. The second tube is not adapted to receive and eject a fluid flow. A second pair of sensing elements is coupled to the second tube.
(FR)
Un mode de réalisation de la présente invention comprend un détecteur de flux thermique ayant un premier tube capillaire couplé à une ligne d'écoulement principale de régulateur de débit massique par une déviation de régulateur de débit massique. Une première paire d'éléments de détection est couplée au premier tube capillaire. Le détecteur thermique comprend également un second tube capillaire ayant une aire de section transversale sensiblement similaire au premier tube capillaire, une première extrémité thermiquement couplée à l'un d'une base de régulateur de débit massique et du premier tube, de façon proximale au premier orifice d'entrée de tube, et une seconde extrémité thermiquement couplée à l'un de la base de régulateur de débit massique et du premier tube, de façon proximale à l'orifice de sortie. Le second tube n'est pas apte à recevoir et éjecter un écoulement de fluide. Une seconde paire d'éléments de détection est couplée au second tube.
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