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1. WO2011000927 - A METHOD FOR FABRICATING AN ELECTROMAGNETIC ACTUATOR, AN ELECTROMAGNETIC ACTUATOR, AND A CHARGED PARTICLE DEVICE COMPRISING THE SAME

Publication Number WO/2011/000927
Publication Date 06.01.2011
International Application No. PCT/EP2010/059395
International Filing Date 01.07.2010
IPC
H02K 15/03 2006.01
HELECTRICITY
02GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
KDYNAMO-ELECTRIC MACHINES
15Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
02of stator or rotor bodies
03having permanent magnets
CPC
B82Y 10/00
BPERFORMING OPERATIONS; TRANSPORTING
82NANOTECHNOLOGY
YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
10Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
B82Y 40/00
BPERFORMING OPERATIONS; TRANSPORTING
82NANOTECHNOLOGY
YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
40Manufacture or treatment of nanostructures
H01F 7/066
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
7Magnets
06Electromagnets; Actuators including electromagnets
066Electromagnets with movable winding
H01J 37/3174
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30Electron-beam or ion-beam tubes for localised treatment of objects
317for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
3174Particle-beam lithography, e.g. electron beam lithography
H02K 1/278
HELECTRICITY
02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
KDYNAMO-ELECTRIC MACHINES
1Details of the magnetic circuit
06characterised by the shape, form or construction
22Rotating parts of the magnetic circuit
27Rotor cores with permanent magnets
2706Inner rotor
272where the magnetisation axis of the magnets is radial or tangential
274consisting of a plurality of circumferentially positioned magnets
2753consisting of magnets or groups of magnets arranged with alternating polarity
278Surface mounted magnets; Inset magnets
H02K 1/28
HELECTRICITY
02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
KDYNAMO-ELECTRIC MACHINES
1Details of the magnetic circuit
06characterised by the shape, form or construction
22Rotating parts of the magnetic circuit
28Means for mounting or fastening rotating magnetic parts on to, or to, the rotor structures
Applicants
  • TECNOTION B.V. [NL]/[NL] (AllExceptUS)
  • KRECHTING, Petrus Theodorus [NL]/[NL] (UsOnly)
Inventors
  • KRECHTING, Petrus Theodorus
Agents
  • VAN SOMEREN, Petronella Francisca Hendrika Maria
Priority Data
200312803.07.2009NL
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) A METHOD FOR FABRICATING AN ELECTROMAGNETIC ACTUATOR, AN ELECTROMAGNETIC ACTUATOR, AND A CHARGED PARTICLE DEVICE COMPRISING THE SAME
(FR) PROCÉDÉ DE FABRICATION D'UN ACTIONNEUR ÉLECTROMAGNÉTIQUE, ACTIONNEUR ÉLECTROMAGNÉTIQUE ET DISPOSITIF À PARTICULES CHARGÉES LE COMPRENANT
Abstract
(EN)
The present invention is related to a method for fabricating an electromagnetic actuator. It is further related to an electromagnetic actuator and a charged particle device comprising such an actuator. According to the present invention, the method for fabricating is characterized by determining an optimal allocation of permanent magnets to reduce the magnetic stray field caused by deviations between the nominal and actual magnetization values of the permanent magnets. The invention further provides a charged particle device comprising an electromagnetic actuator fabricated using the method according to the invention.
(FR)
La présente invention porte sur un procédé de fabrication d'un actionneur électromagnétique. Elle porte en outre sur un actionneur électromagnétique et sur un dispositif à particules chargées comprenant un tel actionneur. Selon la présente invention, le procédé de fabrication est caractérisé par la détermination d'une allocation optimale d'aimants permanents pour réduire le champ magnétique parasite provoqué par des écarts entre les valeurs d'aimantation nominale et réelle des aimants permanents. L'invention porte en outre sur un dispositif à particules chargées comprenant un actionneur électromagnétique fabriqué à l'aide du procédé selon l'invention.
Also published as
Latest bibliographic data on file with the International Bureau