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1. (WO2010151466) METHOD AND SYSTEM FOR CONTROLLING RADIO FREQUENCY POWER
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2010/151466    International Application No.:    PCT/US2010/038790
Publication Date: 29.12.2010 International Filing Date: 16.06.2010
IPC:
H02J 17/00 (2006.01)
Applicants: MKS INSTRUMENTS, INC. [US/US]; 2 Tech Ddrive Suite 201 Andover, MA 01810 (US) (For All Designated States Except US).
NAGARKATTI, Siddharth [US/US]; (US) (For US Only).
TIAN, Feng [CN/US]; (US) (For US Only).
LAM, David [US/US]; (US) (For US Only).
RASHID, Abdul [US/US]; (US) (For US Only).
BENZERROUK, Souheil [DZ/US]; (US) (For US Only).
BYSTRYAK, Ilya [IL/US]; (US) (For US Only).
MENZER, David [US/US]; (US) (For US Only).
SCHUSS, Jack, J. [US/US]; (US) (For US Only).
AMBROSINA, Jesse, E. [US/US]; (US) (For US Only)
Inventors: NAGARKATTI, Siddharth; (US).
TIAN, Feng; (US).
LAM, David; (US).
RASHID, Abdul; (US).
BENZERROUK, Souheil; (US).
BYSTRYAK, Ilya; (US).
MENZER, David; (US).
SCHUSS, Jack, J.; (US).
AMBROSINA, Jesse, E.; (US)
Agent: FLOCKHART-SHANKS, Brenda; Proskauer Rose, LLP One International Place Boston, MA 02110 (US)
Priority Data:
12/491,538 25.06.2009 US
Title (EN) METHOD AND SYSTEM FOR CONTROLLING RADIO FREQUENCY POWER
(FR) PROCÉDÉ ET SYSTÈME PERMETTANT DE COMMANDER UNE PUISSANCE RADIOFRÉQUENCE
Abstract: front page image
(EN)A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
(FR)La présente invention concerne un procédé permettant de commander une puissance pulsée. Le procédé consiste à mesurer une première impulsion de puissance provenant d'un amplificateur de puissance afin d'obtenir des données. Le procédé consiste également à générer un premier signal pour ajuster une seconde impulsion de la puissance délivrée, le premier signal étant en corrélation avec les données afin de minimiser une différence de puissance entre un point de consigne de puissance et une partie sensiblement stable de la seconde impulsion. Le procédé consiste également à générer un second signal pour ajuster la seconde impulsion de la puissance délivrée, le second signal étant en corrélation avec les données afin de minimiser une différence d'amplitude entre une crête de la seconde impulsion et la partie sensiblement stable de la seconde impulsion.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)