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1. (WO2010151224) A PHASE SHIFTING DEVICE AND A METHOD FOR MANUFACTURING THE SAME

Pub. No.:    WO/2010/151224    International Application No.:    PCT/SG2009/000228
Publication Date: Thu Dec 30 00:59:59 CET 2010 International Filing Date: Tue Jun 23 01:59:59 CEST 2009
IPC: G02F 1/025
H01L 21/266
Applicants: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
LIOW, Tsung-Yang Jason
LO, Guo Qiang Patrick
YU, Mingbin
FANG, Qing
Inventors: LIOW, Tsung-Yang Jason
LO, Guo Qiang Patrick
YU, Mingbin
FANG, Qing
Title: A PHASE SHIFTING DEVICE AND A METHOD FOR MANUFACTURING THE SAME
Abstract:
In an embodiment, a phase shifting device may be provided. The phase shifting device may include a supporting layer and a semiconducting layer disposed above the supporting layer. The semiconducting layer may include a first doped region doped with doping atoms of a first conductivity type and arranged on the supporting layer; and a second doped region doped with doping atoms of a second conductivity type being different from the first conductivity type; wherein the second doped region may be disposed over the first doped region such that a first doped regions junction may be formed in a direction substantially parallel to a surface of the supporting layer and a second doped regions junction may be formed in a direction substantially perpendicular to the surface of the supporting layer. A method of forming a phase shifting device and an electro-optic device may also be provided.