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1. (WO2010147470) METHOD FOR MANUFACTURING A MAINLY FILM SHAPED PIEZOELECTRIC ELEMENT

Pub. No.:    WO/2010/147470    International Application No.:    PCT/NL2010/050376
Publication Date: Fri Dec 24 00:59:59 CET 2010 International Filing Date: Sat Jun 19 01:59:59 CEST 2010
IPC: H01L 41/22
H01L 41/08
Applicants: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
VAN DEN ENDE, Daan Anton
GROEN, Wilhelm Albert
Inventors: VAN DEN ENDE, Daan Anton
GROEN, Wilhelm Albert
Title: METHOD FOR MANUFACTURING A MAINLY FILM SHAPED PIEZOELECTRIC ELEMENT
Abstract:
A method of manufacturing a mainly film shaped piezoelectric element comprising a first set of more than one electrode and a second set of more than one electrode (1, 2) that extend mainly coplanar and alternately one another, and a layer of piezoelectric material that is connected to the electrodes, comprising: providing said first and second sets of electrodes; providing a mixture of a fluid, uncured synthetic material and piezoelectric particles; providing a layer (3) of said mixture that connects the electrodes of said first and second set of electrodes; performing a chain building sequence one or more times, the chain building sequence comprising: applying or increasing a voltage to the first and second set of electrodes so as to provide electric fields in said mixture layer between the alternating electrodes of the first and second set of electrodes respectively that cause the piezoelectric particles to spacially arrange as chains of interconnected particles between those electrodes; removing or decreasing said electric field applied to the first and second set of electrodes; the method further comprising curing the mixture layer.