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1. (WO2010146982) POLYURETHANE, COMPOSITION FOR FORMATION OF POLISHING LAYERS THAT CONTAINS SAME, PAD FOR CHEMICAL MECHANICAL POLISHING, AND CHEMICAL MECHANICAL POLISHING METHOD USING SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2010/146982    International Application No.:    PCT/JP2010/059184
Publication Date: 23.12.2010 International Filing Date: 31.05.2010
IPC:
C08G 18/32 (2006.01), C08J 5/14 (2006.01), H01L 21/304 (2006.01)
Applicants: JSR CORPORATION [JP/JP]; 9-2, Higashi-shinbashi 1-chome, Minato-ku, Tokyo 1058640 (JP) (For All Designated States Except US).
OKAMOTO, Takahiro [JP/JP]; (JP) (For US Only).
KUWABARA, Rikimaru [JP/JP]; (JP) (For US Only)
Inventors: OKAMOTO, Takahiro; (JP).
KUWABARA, Rikimaru; (JP)
Agent: OFUCHI, Michie; 2nd Floor, Ogikubo TM Bldg., 26-13, Ogikubo 5-chome, Suginami-ku, Tokyo 1670051 (JP)
Priority Data:
2009-145239 18.06.2009 JP
Title (EN) POLYURETHANE, COMPOSITION FOR FORMATION OF POLISHING LAYERS THAT CONTAINS SAME, PAD FOR CHEMICAL MECHANICAL POLISHING, AND CHEMICAL MECHANICAL POLISHING METHOD USING SAME
(FR) POLYURÉTHANE, COMPOSITION POUR LA FORMATION DE COUCHES DE POLISSAGE QUI LE CONTIENT, TAMPON POUR LE POLISSAGE CHIMICO-MÉCANIQUE ET PRÉCÉDÉ DE POLISSAGE CHIMICO-MÉCANIQUE L'UTILISANT
(JA) ポリウレタンおよびそれを含有する研磨層形成用組成物、ならびに化学機械研磨用パッドおよびそれを用いた化学機械研磨方法
Abstract: front page image
(EN)A polyurethane prepared by reacting a mixture which contains at least (A) a diisocyanate, (B) a polyol, and (C) a chain extender, characterized in that: the polyol (B) has a number-average molecular weight of 400 to 5,000; the chain extender (C) contains (C1) a compound of general formula (1) and (C2) a compound of general formula (2); the number-average molecular weights of the compounds (C1) and (C2) are each less than 400; and the M1/(M1+M2) value is 0.25 to 0.9 wherein M1 is the molar amount of the compound (C1) and M2 is that of the compound (C2). HO-(CR1R2)2m+1 – OH ... (1) HO-(CR3R4)2n – OH ... (2)
(FR)L'invention porte sur un polyuréthane préparé par la réaction d'un mélange qui contient au moins (A) un diisocyanate, (B) un polyol et (C) un allongeur de chaîne, caractérisé en ce que : le polyol (B) a une masse moléculaire moyenne en nombre de 400 à 5 000 ; l'allongeur de chaîne (C) contient (C1) un composé représenté par la formule générale (1) et (C2) un composé représenté par la formule générale (2) ; les masses moléculaires moyennes en nombre des composés (C1) et (C2) sont chacune inférieures à 400 ; et la valeur du rapport M1/(M1+M2) est de 0,25 à 0,9, M1 étant la quantité molaire du composé (C1) et M2 étant celle du composé (C2). HO-(CR1R2)2m+1 – OH (1) HO-(CR3R4)2n – OH (2)
(JA) 本発明にかかるポリウレタンは、少なくとも(A)ジイソシアネートと、(B)ポリオールと、(C)鎖延長剤と、を含有する混合物を反応させて得られたポリウレタンであって、前記(B)ポリオールの数平均分子量は、400~5,000であり、前記(C)鎖延長剤は、(C1)下記一般式(1)で示される化合物と、(C2)下記一般式(2)で示される化合物と、を含み、前記化合物(C1)および前記化合物(C2)の数平均分子量は、400未満であり、前記化合物(C1)のモル数(M)および前記化合物(C2)のモル数(M)から算出されるM/(M+M)の値が、0.25~0.9であることを特徴とする。 HO-(CR2m+1-OH …(1) HO-(CR2n-OH …(2)
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)