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1. (WO2010144267) METHOD AND SYSTEM FOR HEATING A TIP APEX OF A CHARGED PARTICLE SOURCE
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2010/144267 International Application No.: PCT/US2010/036527
Publication Date: 16.12.2010 International Filing Date: 28.05.2010
IPC:
H01J 1/15 (2006.01) ,G05D 23/27 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
1
Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
02
Main electrodes
13
Solid thermionic cathodes
15
Cathodes heated directly by an electric current
G PHYSICS
05
CONTROLLING; REGULATING
D
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
23
Control of temperature
19
characterised by the use of electric means
27
with sensing element responsive to radiation
Applicants: NOTTE IV, John A.[US/US]; US (UsOnly)
PERCIVAL, Randy[US/US]; US (UsOnly)
RAHMAN, Milton[BD/US]; US (UsOnly)
BARRISS, Louise[US/US]; US (UsOnly)
MELLO, Russ[US/US]; US (UsOnly)
DIMANNA, Mark D.[US/US]; US (UsOnly)
CARL ZEISS NTS, LLC[US/US]; One Corporation Way Peabody, Massachusetts 01960, US (AllExceptUS)
Inventors: NOTTE IV, John A.; US
PERCIVAL, Randy; US
RAHMAN, Milton; US
BARRISS, Louise; US
MELLO, Russ; US
DIMANNA, Mark D.; US
Agent: DALEY, Sean P.; Fish & Richardson P.C. P.O. Box 1022 Minneapolis, Minnesota 55440-1022, US
Priority Data:
61/186,52112.06.2009US
Title (EN) METHOD AND SYSTEM FOR HEATING A TIP APEX OF A CHARGED PARTICLE SOURCE
(FR) PROCÉDÉ ET SYSTÈME DE CHAUFFAGE DE L'EXTRÉMITÉ DE POINTE D'UNE SOURCE DE PARTICULES CHARGÉES
Abstract:
(EN) System and method for heating an apex of a tip of a charged particle source, for example, a gas ion source, comprising a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle source and the detector so that the controller can control heating of the tip apex based on the light detected by the detector.
(FR) L'invention porte sur un système et un procédé de chauffage de l'extrémité d'une pointe d'une source de particules chargées, par exemple, une source d'ions de gaz. Les systèmes peuvent comprendre un détecteur conçu pour détecter de la lumière générée par l'extrémité de pointe, ainsi qu'un régulateur couplé à la source de particules chargées et au détecteur de telle manière que le régulateur peut réguler le chauffage de l'extrémité de pointe en fonction de la lumière détectée par le détecteur.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)