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1. (WO2010124217) TREATMENT OF POLISHING PAD WINDOW

Pub. No.:    WO/2010/124217    International Application No.:    PCT/US2010/032253
Publication Date: Fri Oct 29 01:59:59 CEST 2010 International Filing Date: Sat Apr 24 01:59:59 CEST 2010
IPC: H01L 21/304
Applicants: APPLIED MATERIALS, INC.
SWEDEK, Boguslaw, A.
BENVEGNU, Dominic, J.
Inventors: SWEDEK, Boguslaw, A.
BENVEGNU, Dominic, J.
Title: TREATMENT OF POLISHING PAD WINDOW
Abstract:
A window of solid light-transmissive polymer is formed in a polishing pad, and at least one surface of the window is treated to increase the smoothness of the at least one surface.