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1. (WO2010123741) QUARTZ WINDOW HAVING GAS FEED AND PROCESSING EQUIPMENT INCORPORATING SAME

Pub. No.:    WO/2010/123741    International Application No.:    PCT/US2010/031157
Publication Date: Fri Oct 29 01:59:59 CEST 2010 International Filing Date: Fri Apr 16 01:59:59 CEST 2010
IPC: H01L 21/324
Applicants: APPLIED MATERIALS, INC.
KIM, Tae Jung
RIPLEY, Martin
Inventors: KIM, Tae Jung
RIPLEY, Martin
Title: QUARTZ WINDOW HAVING GAS FEED AND PROCESSING EQUIPMENT INCORPORATING SAME
Abstract:
Methods and apparatus for providing a process gas to a substrate in a processing system are disclosed herein. In some embodiments, the substrate processing system may include a process chamber having a substrate support disposed therein; a light source disposed above the process chamber to direct energy towards the substrate support; and a window assembly disposed between the light source and the substrate support to allow light energy provided by the light source to enter the process chamber towards the substrate support, wherein the window assembly includes an inlet to receive a process gas and one or more outlets to distribute the process gas into the process chamber.