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1. (WO2010122717) SAMPLE HOLDER, METHOD FOR USE OF THE SAMPLE HOLDER, AND CHARGED PARTICLE DEVICE

Pub. No.:    WO/2010/122717    International Application No.:    PCT/JP2010/002525
Publication Date: Fri Oct 29 01:59:59 CEST 2010 International Filing Date: Thu Apr 08 01:59:59 CEST 2010
IPC: H01J 37/20
G01N 1/28
H01J 37/317
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社 日立ハイテクノロジーズ
NAGAKUBO, Yasuhira
長久保康平
TANIGAKI, Toshiaki
谷垣俊明
ITO, Katsuji
伊藤勝治
Inventors: NAGAKUBO, Yasuhira
長久保康平
TANIGAKI, Toshiaki
谷垣俊明
ITO, Katsuji
伊藤勝治
Title: SAMPLE HOLDER, METHOD FOR USE OF THE SAMPLE HOLDER, AND CHARGED PARTICLE DEVICE
Abstract:
A sample holder for efficiently performing the processing or observation of a sample by means of charged particles while cooling. Particularly, disclosed is a sample holder whereby the processing or observation of a material which may be affected by the influence of heat damage can be performed in a state in which the material is cooled, and furthermore, the influence due to a sample processing method using charged particles can be reduced by cooling. The sample holder is provided with a sample stage capable of fixing a sample piece extracted from a sample by ion beam irradiation, and a rotation mechanism for rotating the sample stage in a desired direction, which can be attached to an ion beam device and a transmission electron microscope device, and which has a movable heat transfer material for thermally connecting the sample stage and a cooling source, and an isolation material for thermally isolating the sample stage and the heat transfer material from the outside. According to the sample holder, the processing or observation of a sample by means of charged particle beams can be performed while efficiently cooling.