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1. (WO2010122152) TRANSPORT DEVICE HAVING A DEFLECTABLE SEALING FRAME

Pub. No.:    WO/2010/122152    International Application No.:    PCT/EP2010/055454
Publication Date: Fri Oct 29 01:59:59 CEST 2010 International Filing Date: Sat Apr 24 01:59:59 CEST 2010
IPC: H01L 21/677
H01L 21/00
H01L 21/687
Applicants: SINGULUS TECHNOLOGIES AG
REISING, Michael
KEMPF, Stefan
ROTH, Georg
Inventors: REISING, Michael
KEMPF, Stefan
ROTH, Georg
Title: TRANSPORT DEVICE HAVING A DEFLECTABLE SEALING FRAME
Abstract:
The invention relates to a device for transporting a substrate (5) into a treatment zone (2, 3, 22) which can be temporarily separated off in a vacuum-tight manner, and to a corresponding method. A transport device (4) transports a substrate (5) in the plane (XY) to a defined treatment zone (2, 3, 22) of a chamber (1). The transport device (4) has a deflectable sealing frame (6) which can be displaced in a Z direction perpendicular to the XY plane. The sealing frame (6) has two opposite sealing surfaces (10, 11) in the Z direction. A closure device (16, 21, 24) pushes against a first sealing surface (10, 11), the second sealing surface (11, 10) thereby pushing against a chamber wall (32, 31), thereby allowing the space of the treatment zone (2, 3, 22) of the chamber (1) to be sealed.