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1. (WO2010122030) GUIDING DEVICES AND METHODS FOR CONTACTLESS GUIDING OF A WEB IN A WEB COATING PROCESS

Pub. No.:    WO/2010/122030    International Application No.:    PCT/EP2010/055212
Publication Date: Fri Oct 29 01:59:59 CEST 2010 International Filing Date: Wed Apr 21 01:59:59 CEST 2010
IPC: B65H 23/32
B65H 23/24
B65H 27/00
Applicants: APPLIED MATERIALS, INC.
HEIN, Stefan
HERZOG, Andre
SKUK, Peter
BUSCH, John D.
Inventors: HEIN, Stefan
HERZOG, Andre
SKUK, Peter
BUSCH, John D.
Title: GUIDING DEVICES AND METHODS FOR CONTACTLESS GUIDING OF A WEB IN A WEB COATING PROCESS
Abstract:
According to embodiments described herein, a guiding device for contactless guiding of a web (1) in a web coating process application under vacuum conditions is provided. The guiding device (111) includes a curved surface (110) for facing the web, and a group of gas outlets (112) disposed in the curved surface and adapted for giving off a gas flow to form a hover cushion between the curved surface and the web. The guiding device further includes a gas distribution system for selectively providing the gas flow to a first subgroup of the gas outlets (240, 242, 244) and for preventing the gas from flowing to a second subgroup (114) of the gas outlets. The curved surface comprises a web guiding region. The first subgroup of the gas outlets consists of at least one gas outlet in the web guiding region. The second subgroup of gas outlets consists of at least one gas outlet outside of the web guiding region in the web guiding direction.