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1. (WO2010118149) SULFURIZATION OR SELENIZATION IN MOLTEN (LIQUID) STATE FOR THE PHOTOVOLTAIC APPLICATIONS

Pub. No.:    WO/2010/118149    International Application No.:    PCT/US2010/030262
Publication Date: Fri Oct 15 01:59:59 CEST 2010 International Filing Date: Thu Apr 08 01:59:59 CEST 2010
IPC: H01L 31/042
H01L 31/18
Applicants: APPLIED MATERIALS, INC.
SINGH, Kaushal, K.
HOFMANN, Ralf
KRISHNA, Nety, M.
Inventors: SINGH, Kaushal, K.
HOFMANN, Ralf
KRISHNA, Nety, M.
Title: SULFURIZATION OR SELENIZATION IN MOLTEN (LIQUID) STATE FOR THE PHOTOVOLTAIC APPLICATIONS
Abstract:
A method of forming a solar cell incorporating a compound semiconductor is provided. The compound semiconductor is generally of the "II/VI" variety, and is formed by depositing one or more group II elements in a vapor deposition process, and then contacting the deposited layer with a liquid bath of the group VI elements. The liquid bath may comprise a pure element or a mixture of elements. The contacting is performed under a non-reactive atmosphere, or vacuum, and any fugitive vapors may be captured by a cold trap and recycled. The substrate may be subsequently annealed to remove any excess of the group VI elements, which may be similarly recycled.