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1. (WO2010117701) OPTICAL DEVICE WITH LARGE THERMAL IMPEDANCE

Pub. No.:    WO/2010/117701    International Application No.:    PCT/US2010/028995
Publication Date: Fri Oct 15 01:59:59 CEST 2010 International Filing Date: Tue Mar 30 01:59:59 CEST 2010
IPC: G02F 1/025
Applicants: CUNNINGHAM, John, E.
KRISHNAMOORTHY, Ashok V.
SHUBIN, Ivan
LI, Guoliang
ZHENG, Xuezhe
ORACLE AMERICA, INC. FORMERLY KNOWN AS SUN MICROSYSTEMS, INC.
Inventors: CUNNINGHAM, John, E.
KRISHNAMOORTHY, Ashok V.
SHUBIN, Ivan
LI, Guoliang
ZHENG, Xuezhe
Title: OPTICAL DEVICE WITH LARGE THERMAL IMPEDANCE
Abstract:
Embodiments of an optical device, an array of optical devices, and a technique for fabricating the optical device or the array are described. This optical device is implemented on a substrate (such as silicon), and includes a thermally tunable optical waveguide that has good thermal isolation from its surroundings. In particular, a portion of a semiconductor in the optical device, which includes the optical waveguide, is free standing above a gap between the semiconductor layer and the substrate. By reducing the thermal coupling between the optical waveguide and the external environment, the optical device can be thermally tuned with significantly less power consumption.