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1. (WO2010114232) ROCKER DOOR VALVE FOR SEMICONDUCTOR-MANUFACTURING EQUIPMENT
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2010/114232    International Application No.:    PCT/KR2010/001379
Publication Date: 07.10.2010 International Filing Date: 05.03.2010
IPC:
H01L 21/00 (2006.01)
Applicants: SUNRIN CO.,LTD [KR/KR]; 157-13 Nae-ri, Jeongnam-myeon, Hwaseong-si Gyeonggi-do 445-962 (KR) (For All Designated States Except US).
CHOI, Jung ho [KR/KR]; (KR) (For US Only).
JANG, Jung hwan [KR/KR]; (KR) (For US Only)
Inventors: CHOI, Jung ho; (KR).
JANG, Jung hwan; (KR)
Agent: KIM, Jeong-hyun; #1104 BYC Bldg., 648-1 Yeoksam-dong, Gangnam-gu Seoul 135-080 (KR)
Priority Data:
10-2009-0029000 03.04.2009 KR
Title (EN) ROCKER DOOR VALVE FOR SEMICONDUCTOR-MANUFACTURING EQUIPMENT
(FR) VANNE À VOLET BASCULANT POUR MATÉRIEL DE FABRICATION DE SEMI-CONDUCTEURS
(KO) 반도체 제조설비의 로커 도어 밸브
Abstract: front page image
(EN)The present invention relates to a rocker door valve capable of selectively closing a process chamber and a transfer chamber. The present invention achieves a valve actuator assembly having a novel configuration, in which the shape and structure of a main block, a cylinder guide block, etc. of a valve actuator are improved to enable easy replacement of a cylinder, thereby enabling only components to be individually separated without having to disassemble the entirety of the equipment upon the occurrence of a valve failure, and thus significantly shortening the pause time of the equipment during the replacement of the valve. In addition, the present invention applies a dual seal system to the cylinders of the valve actuator to minimize etching of the seal, and employs a bushing in an inner shaft fixing portion to enable accurate vertical motion when the cylinders are driven in the upward and downward directions. Further, the present invention improves the interlinked motion mechanism between the cylinders and blocks of the valve actuator to enable an up/down and individual seal-type motion mechanism, in which a left chamber and a right chamber have an individual seal, to thereby improve the overall opening/closing performance of the valve, to maintain a vacuum state, and to shorten the pause time of the equipment.
(FR)Cette invention concerne une vanne à volet basculant pouvant fermer sélectivement une chambre de traitement ou une chambre de transfert. L'ensemble actionneur de l'invention est d'un type nouveau dans lequel la forme et la structure du bloc principal, du bloc de guidage de vérin, etc. ont été améliorés pour faciliter le remplacement d'un vérin, d'où la possibilité de démonter seulement les composants qui doivent l'être sans désassembler la totalité du matériel en cas de défaillance de la vanne, ce qui réduit sensiblement la durée de l'immobilisation liée au remplacement de ladite vanne. De plus, avec cette invention, les vérins de l'actionneur de clapet reçoivent un système à double joint conçu pour atténuer les attaques sur le joint et la présence d'une bague dans la partie de fixation de la tige intérieure garantit un déplacement vertical précis des vérins. La présente invention concerne en outre une amélioration apportée au mécanisme des mouvements interconnectés entre les vérins et les blocs de l'actionneur de vanne déclenchant un mécanisme de mouvement de haut en bas avec étanchéité individuelle dans lequel une chambre gauche et une chambre droite ont un joint en propre, ce qui améliore les caractéristiques d'ouverture et de fermeture du clapet en maintenant un état de vide et réduit la durée d'immobilisation du matériel.
(KO)본 발명은 프로세스 챔버와 트랜스퍼 챔버를 선택적으로 클로즈시킬 수 있는 로커 도어 밸브에 관한 것이다. 본 발명은 밸브 액추에이터의 메인 블럭, 실린더 가이드 블럭 등의 형상 및 구조 개선을 통해 실린더를 쉽게 교체할 수 있도록 한 새로운 형태의 밸브 액추에이터 어셈블리를 구현함으로써, 밸브 페일시 설비 전체를 분해할 필요없이 부속품만 개별 분리할 수 있는 등 밸브 교체시 설비의 가동중단 시간을 대폭 줄일 수 있는 한편, 밸브 액추에이터의 실린더류에 듀얼 실 방식을 적용하여 실의 식각을 최소화할 수 있고, 내부 샤프트 고정부분에 부싱을 사용하여 구동 업다운시 정확한 수직 운동이 이루어질 수 있도록 할 수 있으며, 또 밸브 액추에이터의 실린더류와 블럭류 간의 연계적인 운동 메카니즘을 개선하여 업다운 및 좌우 챔버의 개별 실을 가능하게 함으로써, 밸브의 전체적인 오픈/클로즈 작동 성능을 향상시킬 수 있음은 물론, 버큠 유지 및 설비 구동 대기 시간을 단축할 수 있는 반도체 제조설비의 로커 도어 밸브를 제공한다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)