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1. (WO2010114117) METHOD AND DEVICE FOR CREATING COMPOSITE IMAGE

Pub. No.:    WO/2010/114117    International Application No.:    PCT/JP2010/056062
Publication Date: Fri Oct 08 01:59:59 CEST 2010 International Filing Date: Sat Apr 03 01:59:59 CEST 2010
IPC: G03F 1/08
G01N 23/225
H01J 37/22
H01L 21/66
H04N 5/225
H04N 5/232
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社日立ハイテクノロジーズ
SHINODA Shinichi
篠田伸一
TOYODA Yasutaka
豊田康隆
MATSUOKA Ryoichi
松岡良一
Inventors: SHINODA Shinichi
篠田伸一
TOYODA Yasutaka
豊田康隆
MATSUOKA Ryoichi
松岡良一
Title: METHOD AND DEVICE FOR CREATING COMPOSITE IMAGE
Abstract:
Provided are a method and device for creating a composite image, which are capable of avoiding pattern deformation caused by multiple irradiation of electron beams when images which have been dividedly captured a plurality of times are subjected to panoramic composition. When a plurality of images are joined together into one image, the joint regions between the edges of two adjacent images are superimposed to generate the one image. Among the two adjacent images, the joint region of an image, the imaging order of which is earlier is left, and the joint region of an image, the imaging order of which is later is erased. In the joint region of the image, the imaging order of which is earlier, the irradiation number of electron beams is less in comparison with the joint region of the image, the imaging order of which is later, so that the pattern deformation caused by the irradiation of the electron beams is less.