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1. (WO2010113298) GAS PHASE REACTOR

Pub. No.:    WO/2010/113298    International Application No.:    PCT/JP2009/056815
Publication Date: Fri Oct 08 01:59:59 CEST 2010 International Filing Date: Thu Apr 02 01:59:59 CEST 2009
IPC: B01J 12/00
C01B 33/107
Applicants: DENKI KAGAKU KOGYO KABUSHIKI KAISHA
電気化学工業株式会社
TERAUCHI, Kazutoshi
寺内 一利
NAKAMOTO, Jun
中本 潤
YOSHIZAWA, Shinichi
吉澤 慎一
MATSUOTO, Kazumasa
松音 一正
KAWANAMI, Mitsunori
河南 光則
Inventors: TERAUCHI, Kazutoshi
寺内 一利
NAKAMOTO, Jun
中本 潤
YOSHIZAWA, Shinichi
吉澤 慎一
MATSUOTO, Kazumasa
松音 一正
KAWANAMI, Mitsunori
河南 光則
Title: GAS PHASE REACTOR
Abstract:
Provided is a reactor suitable particularly for the high-temperature gas phase reaction of chlorosilane with hydrogen, which can achieve a high reaction yield by preventing reverse reaction and the like as much as possible while maintaining high heat transfer efficiency. The reactor is provided with a reaction container for causing a gas phase reaction among plural types of source gases supplied at a predetermined inflow rate from an inflow port and discharging resultant gas as a reaction product gas from an outflow port, a heating means for heating the interior of the reaction container, which is attached along the reaction container, and a heat transfer member for increasing the gas flow rate by being disposed in the reaction container to narrow the area of a gas flow path.