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1. WO2010113107 - MEMS TRANSDUCER FOR AN AUDIO DEVICE

Publication Number WO/2010/113107
Publication Date 07.10.2010
International Application No. PCT/IB2010/051370
International Filing Date 30.03.2010
IPC
H04R 19/00 2006.1
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
19Electrostatic transducers
CPC
H04R 19/00
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
19Electrostatic transducers
H04R 2499/11
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
2499Aspects covered by H04R or H04S not otherwise provided for in their subgroups
10General applications
11Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's
Y10T 29/49005
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
29Metal working
49Method of mechanical manufacture
49002Electrical device making
49005Acoustic transducer
Applicants
  • NXP B.V. [NL]/[NL] (AllExceptUS)
  • VAN LIPPEN, Twan [NL]/[NL] (UsOnly)
  • LANGEREIS, Geert [NL]/[NL] (UsOnly)
  • LUTZ, Josef [AT]/[AT] (UsOnly)
  • SUY, Hilco [NL]/[NL] (UsOnly)
  • VAN DER AVOORT, Cas [NL]/[NL] (UsOnly)
  • JANSMAN, Andreas Bernardus Maria [NL]/[NL] (UsOnly)
Inventors
  • VAN LIPPEN, Twan
  • LANGEREIS, Geert
  • LUTZ, Josef
  • SUY, Hilco
  • VAN DER AVOORT, Cas
  • JANSMAN, Andreas Bernardus Maria
Agents
  • KROTT, Michel W. F. M.
Priority Data
09157025.931.03.2009EP
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) MEMS TRANSDUCER FOR AN AUDIO DEVICE
(FR) TRANSDUCTEUR MEMS POUR DISPOSITIF AUDIO
Abstract
(EN) A MEMS transducer (10) for an audio device comprises a substrate (12), a membrane (14) attached to the substrate (12), and a back-electrode (18) attached to the substrate (12), wherein a resonant frequency of the back-electrode (18) is matched to a resonant frequency of the membrane (14). Further, a method of manufacturing a MEMS transducer (19) for an audio device comprises attaching a membrane to a substrate (12), attaching a back-electrode (18) to the substrate (12), matching a resonant frequency of the back-electrode (18) to a resonant frequency of the membrane (14).
(FR) L'invention porte sur un transducteur à système micro-électromécanique (MEMS) (10) pour dispositif audio qui comprend un substrat (12), une membrane (14) attachée au substrat (12), et une électrode arrière (18) attachée au substrat (12), une fréquence de résonance de l'électrode arrière (18) correspondant à une fréquence de résonance de la membrane (14). L'invention porte en outre sur un procédé de fabrication d'un transducteur MEMS (19) pour dispositif audio qui comprend la fixation d'une membrane à un substrat (12), la fixation d'une électrode arrière (18) au substrat (12), l'adaptation d'une fréquence de résonance de l'électrode arrière (18) à une fréquence de résonance de la membrane (14).
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