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1. (WO2010112051) VIBRATING MICROMECHANICAL SYSTEM HAVING A BEAM-SHAPED ELEMENT

Pub. No.:    WO/2010/112051    International Application No.:    PCT/EP2009/002512
Publication Date: Fri Oct 08 01:59:59 CEST 2010 International Filing Date: Wed Apr 01 01:59:59 CEST 2009
IPC: B81B 3/00
Applicants: SIEMENS AKTIENGESELLSCHAFT
DIENEL, Marco
FORKE, Roman
SCHEIBNER, Dirk
Inventors: DIENEL, Marco
FORKE, Roman
SCHEIBNER, Dirk
Title: VIBRATING MICROMECHANICAL SYSTEM HAVING A BEAM-SHAPED ELEMENT
Abstract:
The invention relates to a micromechanical system (200) having at least one beam-shaped element (210) that comprises an exposed end (211) and is connected to a further element of the micromechanical system (200) at the other end (212) thereof. According to the invention, in order to optimize the mechanical properties of the micromechanical system (200), recesses (213) are provided in the beam-shaped element (210) in such a way that the mass of the beam-shaped elements (210) decreases toward the exposed end (211). The invention further relates to a method for creating a micromechanical system (200) having at least one beam-shaped element (210).