Search International and National Patent Collections
Some content of this application is unavailable at the moment.
If this situation persists, please contact us atFeedback&Contact
1. (WO2010085316) MONOLITHIC ALUMINUM ALLOY TARGET AND METHOD OF MANUFACTURING
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2010/085316 International Application No.: PCT/US2010/000021
Publication Date: 29.07.2010 International Filing Date: 06.01.2010
IPC:
C23C 14/34 (2006.01) ,B21D 19/00 (2006.01) ,B21J 5/00 (2006.01) ,C22F 1/04 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
B PERFORMING OPERATIONS; TRANSPORTING
21
MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
D
WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING
19
Flanging or other edge treatment, e.g. of tubes
B PERFORMING OPERATIONS; TRANSPORTING
21
MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
J
FORGING; HAMMERING; PRESSING; RIVETING; FORGE FURNACES
5
Methods for forging, hammering, or pressing; Special equipment or accessories therefor
C CHEMISTRY; METALLURGY
22
METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
F
CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS OR NON-FERROUS ALLOYS
1
Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
04
of aluminium or alloys based thereon
Applicants:
TOSOH SMD, INC. [US/US]; 3600 Gantz Road Grove City, OH 43123, US (AllExceptUS)
MIAO, Weifang [US/US]; US (UsOnly)
SMATHERS, David, B. [US/US]; US (UsOnly)
BAILEY, Robert, S. [US/US]; US (UsOnly)
Inventors:
MIAO, Weifang; US
SMATHERS, David, B.; US
BAILEY, Robert, S.; US
Agent:
PEACOCK, Bruce, E.; Wegman, Hessler & Vanderburg Suite 200 6055 Rockside Woods Boulevard Cleveland, OH 44131, US
Priority Data:
61/205,67522.01.2009US
Title (EN) MONOLITHIC ALUMINUM ALLOY TARGET AND METHOD OF MANUFACTURING
(FR) CIBLE EN ALLIAGE D'ALUMINIUM MONOLITHIQUE ET PROCÉDÉ DE FABRICATION
Abstract:
(EN) Aluminum or aluminum alloy sputter targets and methods of making same are provided. The pure aluminum or aluminum alloy is mechanically worked to produce a circular blank, and then the blank is given a recrystallization anneal to achieve desirable grain size and crystallographic texture. A 10-50% additional strain is provided to the blank step after the annealing to increase the mechanical strength. Further, in a flange area of the target, the strain is greater than in the other target areas with the strain in the flange area being imparted at a rate of about 20-60% strain. The blank is then finished to form a sputtering target with desirable crystallographic texture and adequate mechanical strength.
(FR) La présente invention a pour objet des cibles de pulvérisation en aluminium ou en alliage d'aluminium et leurs procédés de fabrication. L'aluminium pur ou l'alliage d'aluminium subit un usinage mécanique pour produire une ébauche circulaire, et l'ébauche subit ensuite un recuit de recristallisation pour obtenir une grosseur de grain et une texture cristallographique souhaitables. Une déformation supplémentaire de 10 à 50 % est appliquée à l'ébauche, après le recuit, pour augmenter la résistance mécanique. En outre, dans une zone de collerette de la cible, la déformation est supérieure à celle dans les autres zones cibles, la déformation dans la zone de collerette étant appliquée avec un taux d'environ 20 à 60 % de déformation. L'ébauche est ensuite achevée afin de former une cible de pulvérisation ayant une texture cristallographique souhaitable et une résistance mécanique adéquate.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
JP2012515847US20110056828CN102037153KR1020110106787