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1. (WO2010079632) BIDIRECTIONALLY MOVABLE TABLE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2010/079632 International Application No.: PCT/JP2009/062670
Publication Date: 15.07.2010 International Filing Date: 13.07.2009
IPC:
H01L 21/60 (2006.01) ,G12B 5/00 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
04
the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
50
Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/06-H01L21/326162
60
Attaching leads or other conductive members, to be used for carrying current to or from the device in operation
G PHYSICS
12
INSTRUMENT DETAILS
B
CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
5
Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
Applicants:
株式会社新川 SHINKAWA LTD. [JP/JP]; 東京都武蔵村山市伊奈平2丁目51番地の1 51-1,Inadaira 2-chome,Musashimurayama-shi, Tokyo 2088585, JP (AllExceptUS)
角谷 修 KAKUTANI,Osamu [JP/JP]; JP (UsOnly)
近藤 豊 KONDO,Yutaka [JP/JP]; JP (UsOnly)
和田 庄司 WADA,Syoji [JP/JP]; JP (UsOnly)
Inventors:
角谷 修 KAKUTANI,Osamu; JP
近藤 豊 KONDO,Yutaka; JP
和田 庄司 WADA,Syoji; JP
Agent:
吉田 研二 YOSHIDA, Kenji; 東京都武蔵野市吉祥寺本町1丁目34番12号 34-12,Kichijoji-honcho 1-chome,Musashino-shi, Tokyo 1800004, JP
Priority Data:
2009-00057006.01.2009JP
Title (EN) BIDIRECTIONALLY MOVABLE TABLE
(FR) TABLE MOBILE DE FAÇON BIDIRECTIONNELLE
(JA) 2方向移動テーブル
Abstract:
(EN) A Y-direction motor for an XY-table used for a bonding device is provided with a Y-direction mover (43) including a movable arm (43a) and an annular drive coil (44).  The movable arm (43a) is constructed from a rectangular cross-section pipe consisting of fiber-reinforced plastic, having one end fixed to the table, and extending in the Y-direction.  Also, the movable arm (43a) has openings (43b) formed in the surfaces of the short sides and extending in the Y-direction and moves in the XY-directions together with the table.  The annular drive coil (44) is mounted to the movable arm (43a) by being inserted in the opening (43b) in the movable arm (43a) and has a portion thereof projecting in the width direction of the movable arm from the openings (43b).  The construction speeds up operation of the bonding device.
(FR) Un moteur de direction Y destiné à une table XY utilisée pour un dispositif de liaison est équipé d’un dispositif de déplacement de direction Y (43) incluant un bras mobile (43a) et une bobine d’entraînement annulaire (44). Le bras mobile (43a) est constitué d’un tuyau de section transversale rectangulaire constitué de plastique renforcé de fibres, dont une extrémité est fixée à la table, et s’étendant dans la direction Y. De même, le bras mobile (43a) est pourvu d’ouvertures (43b) formées dans les surfaces des côtés courts et s’étendant dans la direction Y et se déplace dans les directions XY en même temps que la table. La bobine d’entraînement annulaire (44) est montée sur le bras mobile (43a) en étant insérée dans l’ouverture (43b) pratiquée dans le bras mobile (43a) et une partie de celle-ci fait saillie dans la direction de la largeur du bras mobile à partir des ouvertures (43b). Cette construction permet d’accélérer le fonctionnement du dispositif de liaison.
(JA)  ボンディング装置に用いられるXYテーブルのY方向モータに、一端がテーブルに固定されてY方向に延びる繊維強化プラスチックの長方形断面パイプで、各短辺側面にY方向に延びる開口(43b)が設けられ、テーブルと共にXY方向に移動する可動アーム(43a)と、可動アーム(43a)の開口(43b)に差し込まれて可動アーム(43a)に取り付けられ、その一部が可動アーム(43a)の開口(43b)から可動アームの幅方向に突出する環状の駆動コイル(44)と、を含むY方向可動子(43)を備える。これによって、ボンディング装置を高速化する。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
JP2010161094SG172877CN102272910