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1. (WO2010079220) PLASMA SOURCE ELECTRODE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2010/079220 International Application No.: PCT/EP2010/050168
Publication Date: 15.07.2010 International Filing Date: 08.01.2010
IPC:
H01J 37/32 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
Applicants:
PHIVE PLASMA TECHNOLOGIES LIMITED [IE/IE]; Cum-a-ciste Sea Road Malahide Dublin , Dublin, IE (AllExceptUS)
ELLINGBOE, Albert Rogers [US/IE]; IE (UsOnly)
O’FARRELL, David [IE/IE]; IE (UsOnly)
MICHNA, Tomasz [PL/IE]; IE (UsOnly)
Inventors:
ELLINGBOE, Albert Rogers; IE
O’FARRELL, David; IE
MICHNA, Tomasz; IE
Agent:
HANNA MOORE & CURLEY; 13 Lower Lad Lane . Dublin , D2, IE
Priority Data:
0900411.012.01.2009GB
Title (EN) PLASMA SOURCE ELECTRODE
(FR) ÉLECTRODE DE SOURCE DE PLASMA
Abstract:
(EN) An electrode tile configuration is disclosed. The tile has contoured edges dimensioned to control any coupling effects. A plurality of tiles in a matrix configuration is also described.
(FR) L'invention porte sur une configuration de tuile d'électrode. La tuile présente des bords profilés, dimensionnés pour maîtriser d'éventuels effets de couplage. L'invention porte également sur une pluralité de tuiles dans une configuration en réseau.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP2386111US20120001549