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1. (WO2010078264) METHODS AND SYSTEMS OF TRANSFERRING, DOCKING AND PROCESSING SUBSTRATES
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2010/078264 International Application No.: PCT/US2009/069601
Publication Date: 08.07.2010 International Filing Date: 28.12.2009
IPC:
H01L 21/677 (2006.01) ,B65G 49/06 (2006.01) ,B65G 49/07 (2006.01) ,B25J 5/02 (2006.01) ,B25J 9/06 (2006.01) ,G02F 1/13 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49
Conveying systems characterised by their application for specified purposes not otherwise provided for
05
for fragile or damageable materials or articles
06
for fragile sheets, e.g. glass
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49
Conveying systems characterised by their application for specified purposes not otherwise provided for
05
for fragile or damageable materials or articles
07
for semiconductor wafers
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
5
Manipulators mounted on wheels or on carriages
02
travelling along a guideway
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9
Programme-controlled manipulators
06
characterised by multi-articulated arms
G PHYSICS
02
OPTICS
F
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1
Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01
for the control of the intensity, phase, polarisation or colour
13
based on liquid crystals, e.g. single liquid crystal display cells
Applicants:
ARCHERS INC.; Corporation of the Cayman Islands Scotia Centre, 4th Floor P.O. Box 2804 Georgetown, Grand Cayman, KY1-1112, KY (AllExceptUS)
LEI, Lawrence, Chung-Lai [US/US]; US (UsOnly)
MAK, Alfred [US/US]; US (UsOnly)
LIU, Rex [US/US]; US (UsOnly)
PARK, Kon [US/US]; US (UsOnly)
PAK, Samuel, S. [US/US]; US (UsOnly)
WU, Tzy-Chung, Terry [US/US]; US (UsOnly)
ZHU, Simon [US/US]; US (UsOnly)
ROSE, Ronald, L. [US/US]; US (UsOnly)
SHIN, Gene [US/US]; US (UsOnly)
WANG, Xiaoming [US/US]; US (UsOnly)
LOH, Ying Tsong [US/US]; US (UsOnly)
Inventors:
LEI, Lawrence, Chung-Lai; US
MAK, Alfred; US
LIU, Rex; US
PARK, Kon; US
PAK, Samuel, S.; US
WU, Tzy-Chung, Terry; US
ZHU, Simon; US
ROSE, Ronald, L.; US
SHIN, Gene; US
WANG, Xiaoming; US
LOH, Ying Tsong; US
Agent:
SWIATEK, Maria, S.; Morgan Lewis & Bockius LLP 2 Palo Alto Square 3000 El Camino Real, Suite 700 Palo Alto, CA 94306, US
Priority Data:
12/319,22303.01.2009US
12/319,22403.01.2009US
12/319,22503.01.2009US
12/319,23131.12.2008US
Title (EN) METHODS AND SYSTEMS OF TRANSFERRING, DOCKING AND PROCESSING SUBSTRATES
(FR) PROCÉDÉS ET SYSTÈMES DE TRANSFERT, D'ANCRAGE ET DE TRAITEMENT DE SUBSTRATS
Abstract:
(EN) In accordance with some embodiments described herein, methods and systems for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules. In some embodiments a process module facility is integrated with a system for processing substrates comprising at least one process chamber carried in a frame, a sub floor adjacent the process module, a stationary pump and electrical box positioned atop the subfloor, and gas control lines and vacuum exhaust lines housed within the subfloor and coupled to the process.
(FR) La présente invention porte, selon certains modes de réalisation, sur des procédés et sur des systèmes permettant de transférer un substrat vers deux modules de traitement ou plus, comprenant le chargement d'au moins un substrat dans une ou plusieurs chambres transversales mobiles, les chambres transversales mobiles étant transportées sur un rail positionné de façon adjacente aux deux modules de traitement ou plus, et chaque chambre transversale mobile étant conçue pour conserver un état gazeux spécifié pendant le transport du substrat. Un ou plusieurs systèmes d'entraînement sont actionnés pour propulser une ou plusieurs des chambres transversales mobiles le long du rail. La ou les chambres de transfert mobiles s'arriment à un ou plusieurs des modules de traitement, et le substrat est transporté de la chambre transversale mobile vers le ou les modules de traitement. Dans certains modes de réalisation, une fonction de module de traitement est intégrée avec un système pour traiter des substrats comprenant au moins une chambre de traitement transportée dans un cadre, un sous-plancher adjacent au module de traitement, une pompe stationnaire et un boîtier électrique positionné sur le sous-plancher et des circuits de régulation du gaz et des circuits d'échappement sous vide logés dans le sous-plancher et couplés au processus.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)