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1. (WO2010076874) TERAHERTZ EXAMINING APPARATUS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2010/076874 International Application No.: PCT/JP2009/071366
Publication Date: 08.07.2010 International Filing Date: 16.12.2009
IPC:
G01N 21/35 (2014.01) ,G01B 15/02 (2006.01) ,G01N 21/3563 (2014.01) ,G01N 21/3586 (2014.01) ,G01N 22/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
25
Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31
Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35
using infra-red light
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
15
Measuring arrangements characterised by the use of wave or particle radiation
02
for measuring thickness
[IPC code unknown for G01N 21/3563][IPC code unknown for G01N 21/3586]
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
22
Investigating or analysing materials by the use of microwaves
Applicants:
CANON KABUSHIKI KAISHA [JP/JP]; 30-2, Shimomaruko 3-chome, Ohta-ku, Tokyo 1468501, JP (AllExceptUS)
OUCHI, Toshihiko [JP/JP]; JP (UsOnly)
KASAI, Shintaro [JP/JP]; JP (UsOnly)
Inventors:
OUCHI, Toshihiko; JP
KASAI, Shintaro; JP
Agent:
ABE, Takuma; C/O CANON KABUSHIKI KAISHA, 30-2, Shimomaruko 3-chome, Ohta-ku, Tokyo 1468501, JP
Priority Data:
2009-00046505.01.2009JP
Title (EN) TERAHERTZ EXAMINING APPARATUS
(FR) APPAREIL D'EXAMEN TERAHERTZ
Abstract:
(EN) In an examining apparatus or method, values of thickness and characteristic of an object, or distributions thereof can be simultaneously acquired. The examining apparatus includes a portion 9 for irradiating an object 2 with radiation, a portion 10 for detecting the radiation from the object, an acquiring portion 26, a storing portion 21 and a calculating portion 20. The acquiring portion acquires transmission time associated with detection time of radiation, and amplitude of the radiation. The storing portion beforehand stores relationship data between the transmission time and amplitude, and representative values of characteristic of the object. The calculating portion obtains values of thickness and characteristic of the object based on the transmission time, amplitude and relationship data.
(FR) L'invention concerne un appareil ou un procédé d'examen dans lequel des valeurs d'épaisseur et de caractéristique d'un objet, ou des distributions de celui-ci peuvent être acquises simultanément. L'appareil d'examen comporte une partie (9) permettant d'irradier un objet (2) par rayonnement, une partie (10) détection du rayonnement à partir de l'objet, une partie acquisition (26), une partie stockage (21) et une partie calcul (20). La partie acquisition acquiert le temps de transmission associé au temps de détection de rayonnement, et d'amplitude du rayonnement. La partie stockage stocke au préalable des données de relations entre le temps de transmission et l'amplitude, et des valeurs représentatives de la caractéristique de l'objet. La partie calcul obtient des valeurs d'épaisseur et de caractéristique de l'objet sur la base du temps de transmission, de l'amplitude et des données de relations.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
US20110267600CN102272578