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1. (WO2010076540) OPTICAL FIBRE DEVICE FOR INTERFEROMETRIC ANALYSIS OF THE SURFACE CONDITION OF AN OBJECT
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2010/076540 International Application No.: PCT/FR2009/052717
Publication Date: 08.07.2010 International Filing Date: 29.12.2009
IPC:
G01B 9/02 (2006.01) ,G01B 11/24 (2006.01) ,G01B 21/00 (2006.01) ,G01B 7/34 (2006.01)
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9
Instruments as specified in the subgroups and characterised by the use of optical measuring means
02
Interferometers
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
24
for measuring contours or curvatures
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21
Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
7
Measuring arrangements characterised by the use of electric or magnetic means
34
for measuring roughness or irregularity of surfaces
Applicants:
UNIVERSITE JOSEPH FOURIER [FR/FR]; 621, avenue Centrale B.P. 53 F-38041 Grenoble Cedex 9, FR (AllExceptUS)
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE [FR/FR]; 3, rue Michel Ange F-75794 Paris Cedex 16, FR (AllExceptUS)
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES [FR/FR]; Bâtiment Le Ponant D 25, rue Leblanc F-75015 Paris, FR (AllExceptUS)
CHEVRIER, Joël [FR/FR]; FR (UsOnly)
HUANT, Serge [FR/FR]; FR (UsOnly)
SCHWARTZ, Wilfrid [FR/FR]; FR (UsOnly)
SIRIA, Alessandro [IT/FR]; FR (UsOnly)
Inventors:
CHEVRIER, Joël; FR
HUANT, Serge; FR
SCHWARTZ, Wilfrid; FR
SIRIA, Alessandro; FR
Agent:
CABINET BEAUMONT; 1, rue Champollion F-38000 Grenoble, FR
Priority Data:
085909129.12.2008FR
Title (EN) OPTICAL FIBRE DEVICE FOR INTERFEROMETRIC ANALYSIS OF THE SURFACE CONDITION OF AN OBJECT
(FR) DISPOSITIF A FIBRE OPTIQUE D'ANALYSE INTERFEROMETRIQUE DE L'ETAT DE SURFACE D'UN OBJET
Abstract:
(EN) The invention relates to an optical device for the interferometric analysis of the surface condition of an object (2), including: a light source (1); an optical fibre (42) capable of receiving the incident light wave and transmitting said wave to the object (2); a detector (9) capable of detecting a combination between a light wave (45) reflected by the optical fibre and a light wave (46) returned by the object; and in which the optical fibre (42) has a free end in the shape of a cone, with a vertex angle of between 15 and 25 degrees, the tip of the cone having dimensions of less than 50 x 50 nm, and the tip of the cone being placed, while in use, at a distance of between 5 and 50 μm from the surface of the object.
(FR) L'invention concerne un dispositif optique d'analyse interférométrique de l'état de surface d'un objet (2), comprenant une source lumineuse (1); une fibre optique (42) apte à recevoir l'onde lumineuse incidente pour la transmettre à l'objet (2); un détecteur (9) apte à détecter une combinaison entre une onde lumineuse (45) réfléchie par la fibre optique et une onde lumineuse (46) renvoyée par l'objet; et dans lequel la fibre optique (42) a une extrémité libre en forme de cône d'angle au sommet compris entre 15 et 25 degrés, la pointe du cône ayant des dimensions inférieures à 50 x 50 nm, et la pointe du cône est disposée, en utilisation, à une distance de la surface de l'objet comprise entre 5 et 50 μm.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: French (FR)
Filing Language: French (FR)
Also published as:
EP2370779US20120127474