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1. (WO2010073288) INFRARED SENSOR AND INFRARED SENSOR MANUFACTURING METHOD
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2010/073288 International Application No.: PCT/JP2008/003887
Publication Date: 01.07.2010 International Filing Date: 22.12.2008
Chapter 2 Demand Filed: 13.11.2009
IPC:
G01J 1/02 (2006.01) ,H01L 27/14 (2006.01) ,H01L 37/02 (2006.01)
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1
Photometry, e.g. photographic exposure meter
02
Details
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27
Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
14
including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
37
Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using Nernst-Ettinghausen effect; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof
02
using thermal change of dielectric constant, e.g. working above and below the Curie point
Applicants:
パイオニア株式会社 PIONEER CORPORATION [JP/JP]; 神奈川県川崎市幸区新小倉1番1号 1-1, Shin-ogura, Saiwai-ku, Kawasaki-shi, Kanagawa 2120031, JP (AllExceptUS)
藤本健二郎 FUJIMOTO, Kenjiro [JP/JP]; JP (UsOnly)
前田孝則 MAEDA, Takanori [JP/JP]; JP (UsOnly)
河野高博 KAWANO, Takahiro [JP/JP]; JP (UsOnly)
Inventors:
藤本健二郎 FUJIMOTO, Kenjiro; JP
前田孝則 MAEDA, Takanori; JP
河野高博 KAWANO, Takahiro; JP
Agent:
落合稔 OCHIAI, Minoru; 東京都千代田区岩本町1丁目12番4号 大洋ビル2階 2th Floor, taiyo Building, 12-4, Iwamotocho 1-chome, Chiyoda-ku, Tokyo 1010032, JP
Priority Data:
Title (EN) INFRARED SENSOR AND INFRARED SENSOR MANUFACTURING METHOD
(FR) CAPTEUR À INFRAROUGES ET PROCÉDÉ DE FABRICATION D'UN CAPTEUR À INFRAROUGES
(JA) 赤外線センサおよび赤外線センサの製造方法
Abstract:
(EN) Provided are an infrared sensor which has improved detection sensitivity and can simply be manufactured with high yield, and an infrared sensor manufacturing method. The infrared sensor has a frame-like substrate part (2) formed as a four-side frame, a projecting base material part (3) formed inside the substrate part (2) and extending in an infrared incident direction, and an infrared detection part (5) provided at least on the lateral face of the upper portion of the base material part (3). The base material part (3) has a grid constitution obtained by composing element base material parts (4) comprising rib-like vertical base material parts (4a) and rib-like transverse base material parts (4b).
(FR) L'invention concerne un capteur à infrarouges caractérisé par sa sensibilité de détection améliorée et sa simplicité de fabrication en grande série, ainsi qu'un procédé de fabrication d'un capteur à infrarouges. Le capteur à infrarouges est doté d'une partie (2) de substrat en cadre, formée comme un cadre quadrilatéral, d'une partie saillante (3) en matériau de base formée à l'intérieur de la partie (2) de substrat et s'étendant dans une direction d'incidence des infrarouges, et d'une partie (5) de détection d'infrarouges aménagée au moins sur la face latérale de la partie supérieure de la partie (3) en matériau de base. La partie (3) en matériau de base présente une constitution en quadrillage obtenue en combinant des pièces élémentaires (4) en matériau de base comprenant des pièces verticales (4a) en matériau de base en forme de nervures et des pièces transversales (4b) en matériau de base en forme de nervures.
(JA)  検出感度を向上させることができる共に、簡単且つ歩留り良く製造することができる赤外線センサおよび赤外線センサの製造方法を提供する。 四周枠状に形成された枠状基板部2と、枠状基板部2の内側に形成され、赤外線の入射方向に延在する突出基材部3と、突出基材部3の少なくとも上部側面に設けられた赤外線検出部5と、を備え、突出基材部3は、リブ状の複数の縦基材部4aとリブ状の複数の横基材部4bとから成る複数の要素基材部4を格子状に組んで構成されている。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
JPWO2010073288US20110260062