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1. (WO2010073287) INFRARED SENSOR AND METHOD FOR MANUFACTURING INFRARED SENSOR
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2010/073287 International Application No.: PCT/JP2008/003886
Publication Date: 01.07.2010 International Filing Date: 22.12.2008
Chapter 2 Demand Filed: 23.02.2010
IPC:
G01J 1/02 (2006.01) ,H01L 27/14 (2006.01) ,H01L 37/02 (2006.01)
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1
Photometry, e.g. photographic exposure meter
02
Details
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27
Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
14
including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
37
Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using Nernst-Ettinghausen effect; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof
02
using thermal change of dielectric constant, e.g. working above and below the Curie point
Applicants:
パイオニア株式会社 PIONEER CORPORATION [JP/JP]; 神奈川県川崎市幸区新小倉1番1号 1-1, Shin-ogura, Saiwai-ku, Kawasaki-shi, Kanagawa 2120031, JP (AllExceptUS)
藤本健二郎 FUJIMOTO, Kenjiro [JP/JP]; JP (UsOnly)
前田孝則 MAEDA, Takanori [JP/JP]; JP (UsOnly)
河野高博 KAWANO, Takahiro [JP/JP]; JP (UsOnly)
Inventors:
藤本健二郎 FUJIMOTO, Kenjiro; JP
前田孝則 MAEDA, Takanori; JP
河野高博 KAWANO, Takahiro; JP
Agent:
落合 稔 OCHIAI, Minoru; 東京都千代田区岩本町1丁目12番4号 大洋ビル2階 2th Floor, taiyo Building, 12-4, Iwamotocho 1-chome, Chiyoda-ku, Tokyo 1010032, JP
Priority Data:
Title (EN) INFRARED SENSOR AND METHOD FOR MANUFACTURING INFRARED SENSOR
(FR) CAPTEUR À INFRAROUGES ET PROCÉDÉ DE FABRICATION D'UN CAPTEUR À INFRAROUGES
(JA) 赤外線センサおよび赤外線センサの製造方法
Abstract:
(EN) Provided are an infrared sensor capable of achieving improved detection sensitivity and being easily manufactured in high yield and a method for manufacturing the same. The infrared sensor is provided with a substrate (2), a projecting base material section (3) provided in a projecting manner on the substrate (2) and extending in the direction of incidence of infrared light and an infrared detection section (5) provided on the side surface of at least the upper portion of the projecting base material section (3). The projecting base material section (3) is constituted by assembling plural element base material parts (4) composed of plural rib-shaped vertical base material parts (4a) and plural rib-shaped horizontal base material parts (4b) in a grid pattern.
(FR) L'invention concerne un capteur à infrarouges capable d'atteindre une sensibilité de détection améliorée, et facile à fabriquer en grande série, ainsi qu'un procédé pour sa fabrication. Le capteur à infrarouges est doté d'un substrat (2), d'une section saillante (3) en matériau de base aménagée de manière saillante sur le substrat (2) et s'étendant dans la direction d'incidence d'une lumière infrarouge, et d'une section (5) de détection d'infrarouges aménagée sur la surface latérale de la partie supérieure au moins de la section saillante (3) en matériau de base. La section saillante (3) en matériau de base est constituée en assemblant une pluralité de pièces élémentaires (4) en matériau de base composées d'une pluralité de pièces verticales (4a) en matériau de base en forme de nervures et d'une pluralité de pièces horizontales (4b) en matériau de base en forme de nervures selon un motif en quadrillage.
(JA)  検出感度を向上させることができる共に、歩留り良く簡単に製造することができる赤外線センサおよびその製造方法を提供する。 基板2と、基板2上に突設され赤外線の入射方向に延在する突出基材部3と、突出基材部3の少なくとも上部側面に設けられた赤外線検出部5と、を備え、突出基材部3は、リブ状の複数の縦基材部4aとリブ状の複数の横基材部4bとから成る複数の要素基材部4を格子状に組んで構成されている。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)