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1. WO2010057098 - HIGH TEMPERATURE TRANSDUCER USING SOI ELECTRONICS

Publication Number WO/2010/057098
Publication Date 20.05.2010
International Application No. PCT/US2009/064594
International Filing Date 16.11.2009
IPC
G01L 9/06 2006.01
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
02by making use of variations in ohmic resistance, e.g. of potentiometers
06of piezo-resistive devices
CPC
G01L 19/0092
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
0092Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
G01L 19/02
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
02Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
G01L 19/04
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
04Means for compensating for effects of changes of temperature ; , i.e. other than electric compensation
G01L 9/0052
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0051using variations in ohmic resistance
0052of piezoresistive elements
G01L 9/065
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
02by making use of variations in ohmic resistance, e.g. of potentiometers, ; , i.e. electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
06of piezo-resistive devices
065with temperature compensating means
Applicants
  • KULITE SEMICONDUCTOR PRODUCTS, INC. [US]/[US] (AllExceptUS)
  • KURTZ, Anthony, D. [US]/[US] (UsOnly)
  • LANDMANN, Wolf, S. [US]/[US] (UsOnly)
Inventors
  • KURTZ, Anthony, D.
  • LANDMANN, Wolf, S.
Agents
  • KOWALEWSKI, Filip, A.
Priority Data
12/291,86814.11.2008US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) HIGH TEMPERATURE TRANSDUCER USING SOI ELECTRONICS
(FR) TRANSDUCTEUR HAUTE TEMPÉRATURE UTILISANT DES CIRCUITS ÉLECTRONIQUES SOI
Abstract
(EN)
A high temperature pressure sensing system which includes a SOI Wheatstone bridge including piezoresistors is disclosed. The bridge provides an output which is applied to an analog to digital converter also fabricated using SOI technology. The output of the analog to digital converter is applied to microprocessor, which microprocessor processes the data or output of the bridge to produce a digital output indicative of bridge value. The microprocessor also receives an output from another analog to digital converter indicative of the temperature of the bridge as monitored by a span resistor coupled to the bridge. The microprocessor has a separate memory coupled thereto which is also fabricated from SOI technology and which memory stores various data indicative of the microprocessor also enabling the microprocessor test and system test to be performed.
(FR)
L'invention concerne un système de détection de pression haute température comprenant un pont SOI Wheatstone comportant des piézorésistances. Le pont fournit une sortie qui est appliquée à un convertisseur analogique/numérique également fabriqué à l'aide de la technologie SOI. La sortie du convertisseur analogique/numérique est appliquée au microprocesseur, ledit microprocesseur traitant les données ou la sortie du pont pour obtenir une sortie numérique indicatrice de la valeur de pont. Le microprocesseur reçoit également une sortie d'un autre convertisseur analogique/numérique indicatrice de la température du pont telle que surveillée par une résistance d'enjambement couplée au pont. Le microprocesseur possède une mémoire séparée couplée à celui-ci qui est également fabriquée selon la technologie SOI et ladite mémoire stocke diverses données relatives au microprocesseur permettant également de tester le microprocesseur et le système.
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