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1. WO2010050542 - HARD MULTILAYER FILM FORMED BODY AND METHOD FOR MANUFACTURING SAME

Publication Number WO/2010/050542
Publication Date 06.05.2010
International Application No. PCT/JP2009/068555
International Filing Date 29.10.2009
IPC
C23C 14/06 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
B23B 27/14 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
BTURNING; BORING
27Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
14Cutting tools of which the bits or tips are of special material
CPC
C23C 14/025
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
02Pretreatment of the material to be coated
024Deposition of sublayers, e.g. to promote adhesion of the coating
025Metallic sublayers
C23C 14/0605
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
0605Carbon
C23C 14/0635
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
0635Carbides
C23C 14/35
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
34Sputtering
35by application of a magnetic field, e.g. magnetron sputtering
C23C 28/322
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
28Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
32including at least one pure metallic layer
322only coatings of metal elements only
C23C 28/341
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
28Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
34including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
341with at least one carbide layer
Applicants
  • NTN株式会社 NTN CORPORATION [JP]/[JP] (AllExceptUS)
  • 大平 晃也 OOHIRA, Kouya (UsOnly)
  • 伊藤 直子 ITO, Naoko (UsOnly)
  • 佐藤 洋司 SATO, Yoji (UsOnly)
  • 筒井 英之 TSUTSUI, Hideyuki (UsOnly)
Inventors
  • 大平 晃也 OOHIRA, Kouya
  • 伊藤 直子 ITO, Naoko
  • 佐藤 洋司 SATO, Yoji
  • 筒井 英之 TSUTSUI, Hideyuki
Agents
  • 和気 操 WAKI, Misao
Priority Data
2008-27885229.10.2008JP
2009-22004825.09.2009JP
2009-22007425.09.2009JP
2009-22008825.09.2009JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) HARD MULTILAYER FILM FORMED BODY AND METHOD FOR MANUFACTURING SAME
(FR) CORPS FORMANT UN FILM MULTICOUCHE DUR ET SON PROCÉDÉ DE FABRICATION
(JA) 硬質多層膜成形体およびその製造方法
Abstract
(EN)
Provided are a hard multilayer film formed body having excellent abrasion resistance which is provided with an intermediate layer having excellent adhesion to a substrate and a DLC film that is a surface layer having excellent abrasion resistance and in which peeling does not occur between the DLC film and the intermediate layer, and a method for manufacturing same.  A hard multilayer film formed body (1) is configured by forming a multilayer film on the surface of a substrate produced from a cemented carbide material or an iron-based material, wherein the multilayer film comprises [1] a film mainly produced from DLC and formed as a surface layer (5) of the multilayer, [2] an intermediate layer (3) mainly produced from a metal-based material and formed between the surface layer (5) and the substrate (2), and [3] a stress relaxation layer (4) mainly produced from carbon and formed between the intermediate layer (3) and the surface layer (5).  The stress relaxation layer (4) is a DLC inclined layer, the hardness of which increases continuously or in stages from the intermediate layer (3) side to the surface layer (5) side.
(FR)
L'invention concerne un corps formant un film multicouche dur ayant une excellente résistance à l'abrasion qui comporte une couche intermédiaire ayant une excellente adhésion à un substrat et un film de carbone analogue au diamant (DLC) qui est une couche de surface ayant une excellente résistance à l'abrasion et dans lequel un pelage ne se produit pas entre le film de DLC et la couche intermédiaire. L'invention concerne également un procédé de fabrication dudit corps. Un corps formant un film multicouche dur (1) est configuré par la formation d'un film multicouche sur la surface d'un substrat obtenu à partir d'un matériau de carbure cémenté ou d'un matériau à base de fer, le film multicouche comprenant [1] un film obtenu principalement à partir de DLC et formé en tant que couche de surface (5) de la multicouche, [2] une couche intermédiaire (3) obtenue principalement à partir d'un matériau à base de métal et formée entre la couche de surface (5) et la surface (2) et [3] une couche de relaxation des contraintes (4) obtenue principalement à partir de carbone et formée entre la couche intermédiaire (3) et la couche de surface (5). La couche de relaxation des contraintes (5) est une couche inclinée de DLC, dont la dureté augmente en continu ou par étages du côté couche intermédiaire (3) au côté couche de surface (5).
(JA)
 基材と密着性に優れる中間層と、耐摩耗性に優れる表面層であるDLC膜とを備え、DLC膜と中間層との間でも剥離を生じることがなく、耐摩耗性にも優れる硬質多層膜成形体、および、その製造方法を提供する。超硬合金材料または鉄系材料からなる基材の表面に多層の膜を形成してなる硬質多層膜成形体1であって、上記多層の膜は、(1)この多層の表面層5として形成される、DLCを主体とする膜と、(2)この表面層5と上記基材2との間に形成される、金属系材料を主体とする中間層3と、(3)この中間層3と上記表面層5との間に形成される炭素を主体とする応力緩和層4とからなる。この応力緩和層4は、その硬度が中間層3側から表面層5側へ連続的または段階的に上昇するDLC傾斜層である。
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