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1. WO2010048604 - SYSTEM METHOD AND APPARATUS FOR SELECTING AND CONTROLLING LIGHT SOURCE BANDWIDTH

Publication Number WO/2010/048604
Publication Date 29.04.2010
International Application No. PCT/US2009/061981
International Filing Date 24.10.2009
IPC
H01S 3/10 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
CPC
G01J 2003/1208
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
1208Prism and grating
G01J 3/02
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
G01J 3/0237
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
0237Adjustable, e.g. focussing
G01J 3/027
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
027Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
G01J 3/06
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
06Scanning arrangements ; arrangements for order-selection
G01J 3/14
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
14using refracting elements, e.g. prisms
Applicants
  • CYMER, INC. [US]/[US] (AllExceptUS)
  • FIGUEROA, Efrain [US]/[US] (UsOnly)
  • PARTLO, William, N. [US]/[US] (UsOnly)
  • ALGOTS, John Martin [US]/[US] (UsOnly)
Inventors
  • FIGUEROA, Efrain
  • PARTLO, William, N.
  • ALGOTS, John Martin
Agents
  • LEAVELL, George
Priority Data
12/605,30623.10.2009US
61/197,24624.10.2008US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) SYSTEM METHOD AND APPARATUS FOR SELECTING AND CONTROLLING LIGHT SOURCE BANDWIDTH
(FR) SYSTÈME, PROCÉDÉ ET APPAREIL PERMETTANT DE SÉLECTIONNER ET DE COMMANDER LA LARGEUR DE BANDE D'UNE SOURCE LUMINEUSE
Abstract
(EN) A mechanism for bandwidth selection includes a dispersive optical element having a body including a reflective face of dispersion including an area of incidence extending in a longitudinal axis direction along the reflective face of the dispersive optical element The body also includes a first end block, disposed at a first longitudinal end of the body and a second end block, disposed at a second longitudinal end of the body, the second longitudinal end being opposite the first longitudinal end The bandwidth selection mechanism also includes a first actuator mounted on a second face of the dispersive optical element, the second face opposite the reflective face, the first actuator having a first end coupled to the first end block and a second end coupled to the second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block
(FR) Le mécanisme permettant de sélectionner une largeur de bande selon la présente invention inclut un élément optique dispersif pourvu d'un corps incluant une face réfléchissante de dispersion incluant une zone d'incidence s'étendant dans la direction d'un axe longitudinal le long de la face réfléchissante de l'élément optique dispersif. Le corps inclut également une première entretoise, disposée à une première extrémité longitudinale du corps et une seconde entretoise, disposée à une seconde extrémité longitudinale du corps, la seconde extrémité longitudinale étant située à l'opposé de la première extrémité longitudinale. Le mécanisme de sélection de largeur de bande inclut également un premier organe de commande monté sur une seconde face de l'élément optique dispersif, la seconde face étant située à l'opposé de la face réfléchissante. Le premier organe de commande est doté d'une première extrémité couplée à la première entretoise et d'une seconde extrémité couplée à la seconde entretoise. Le premier organe de commande fonctionne de manière à appliquer des forces égales et opposées à la première entretoise et à la seconde entretoise.
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