WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2010032910) SUBSTRATE-TRANSFERRING DEVICE, SUBSTRATE-PROCESSING APPARATUS HAVING THE SAME, AND METHOD OF TRANSFERRING SUBSTRATE USING THE SUBSTRATE-TRANSFERRING DEVICE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2010/032910    International Application No.:    PCT/KR2009/001752
Publication Date: 25.03.2010 International Filing Date: 06.04.2009
IPC:
H01L 21/687 (2006.01)
Applicants: SEMES CO., LTD. [KR/KR]; #278, Mosi-ri, Jiksan-eup, Seobuk-gu Cheonan-si, Chungcheongnam 330-290 (KR) (For All Designated States Except US).
KIM, Dae-Ho [KR/KR]; (KR) (For US Only).
HONG, Sang-Seok [KR/KR]; (KR) (For US Only).
PARK, Joo-Jib [KR/KR]; (KR) (For US Only).
PARK, Sun-Yong [KR/KR]; (KR) (For US Only)
Inventors: KIM, Dae-Ho; (KR).
HONG, Sang-Seok; (KR).
PARK, Joo-Jib; (KR).
PARK, Sun-Yong; (KR)
Agent: KWON, Hyuk-Soo; (KR).
SONG, Yun-Ho; (KR).
OH, Se-Jun; (KR)
Priority Data:
10-2008-0092113 19.09.2008 KR
Title (EN) SUBSTRATE-TRANSFERRING DEVICE, SUBSTRATE-PROCESSING APPARATUS HAVING THE SAME, AND METHOD OF TRANSFERRING SUBSTRATE USING THE SUBSTRATE-TRANSFERRING DEVICE
(FR) DISPOSITIF DE TRANSFERT DE SUBSTRAT, APPAREIL DE TRAITEMENT DE SUBSTRAT COMPRENANT CE DISPOSITIF, ET PROCÉDÉ PERMETTANT DE TRANSFÉRER UN SUBSTRAT EN UTILISANT LE DISPOSITIF DE TRANSFERT DE SUBSTRAT
Abstract: front page image
(EN)Provided is a substrate-transferring device including a plurality of horizontally movable arms, a body, and a plurality of guides. The plurality of horizontally movable arms, each is adapted for loading a substrate. The body is coupled to the arms and moving the respective arms horizontally. The plurality of guides are fixed to the body, and disposed respectively behind the arms, and guide positions of substrates loaded on the respectively corresponding arms when the arms move rearward. Accordingly, the substrate-transferring device prevents a substrate from being removed while transferring the substrate and transfers a substrate stably, so as to improve transfer efficiency.
(FR)
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)