Search International and National Patent Collections

1. (WO2010032779) MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD

Pub. No.:    WO/2010/032779    International Application No.:    PCT/JP2009/066235
Publication Date: Mar 25, 2010 International Filing Date: Sep 17, 2009
IPC: G11B 5/84
Applicants: ULVAC, INC.
株式会社アルバック
NISHIHASHI Tsutomu
西橋 勉
WATANABE Kazuhiro
渡辺 一弘
MORITA Tadashi
森田 正
SATO Kenji
佐藤 賢治
TANAKA Tsutomu
田中 努
UZUMAKI Takuya
渦巻 拓也
Inventors: NISHIHASHI Tsutomu
西橋 勉
WATANABE Kazuhiro
渡辺 一弘
MORITA Tadashi
森田 正
SATO Kenji
佐藤 賢治
TANAKA Tsutomu
田中 努
UZUMAKI Takuya
渦巻 拓也
Title: MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD
Abstract:
Provided is a magnetic recording medium manufacturing method that reduces magnetic recording medium manufacturing costs and also shortens manufacturing time. Because demagnetization processing of a magnetic film (44) and removal of a resist (49) are performed in the same vacuum tank (11), fewer vacuum tanks (11) are needed, simplifying the construction of the device. Since it is also unnecessary to transport the processed article (40) between the demagnetization processing and the removal of the resist (49), the time required for manufacturing the magnetic recording medium (50) is shortened. The kinetic energy per constituent element is caused to be lower for the second process gas ions than the first process gas ions, so even when resist (49) is removed, the magnetic part (51) (memory region) will not be demagnetized.