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1. (WO2010030773) PROBE MARK INSPECTION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2010/030773    International Application No.:    PCT/US2009/056505
Publication Date: 18.03.2010 International Filing Date: 10.09.2009
IPC:
G06K 9/00 (2006.01)
Applicants: RUDOLPH TECHNOLOGIES, INC. [US/US]; One Rudolph Road Flanders, New Jersey 07836 (US) (For All Designated States Except US).
DOE, Rodney [US/US]; (US) (For US Only).
STROM, John T. [US/US]; (US) (For US Only)
Inventors: DOE, Rodney; (US).
STROM, John T.; (US)
Agent: CZAJA, Timothy A.; (US)
Priority Data:
61/096,182 11.09.2008 US
Title (EN) PROBE MARK INSPECTION
(FR) INSPECTION DE MARQUES DE SONDAGE
Abstract: front page image
(EN)Probe mark inspection involves a recipe based on unique image characteristics or combinations of unique image characteristics. Result images are correlated with a reference created to determine which image characteristic or combination of image characteristics provides an improved contrast.
(FR)Une inspection de marques de sondage implique une recette basée sur des caractéristiques d’image uniques ou des combinaisons de caractéristiques d’image uniques. Les images du résultat sont corrélées avec une référence créée pour déterminer quelle caractéristique d’image ou combinaison de caractéristiques d’image fournit un contraste amélioré.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)