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Machine translation
1. (WO2010030162) IMPROVED CAPACITIVE SENSOR AND METHOD FOR MAKING THE SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2010/030162    International Application No.:    PCT/MY2009/000135
Publication Date: 18.03.2010 International Filing Date: 03.09.2009
IPC:
G01N 27/22 (2006.01), H01L 21/28 (2006.01), G01N 27/02 (2006.01), G01N 33/18 (2006.01)
Applicants: MIMOS BERHAD [MY/MY]; Technology Park Malaysia Bukit Jalil 57000 Kuala Lumpur (MY) (For All Designated States Except US).
SULAIMAN, Suraya [MY/MY]; (MY) (For US Only).
TAMSIR, Agus, Santoso [ID/MY]; (MY) (For US Only).
MANUT, Azrif [MY/MY]; (MY) (For US Only).
ALIAS, Dzuzlindah, Muhamad [MY/MY]; (MY) (For US Only).
ZAIN, Azlina, Mohd [MY/MY]; (MY) (For US Only)
Inventors: SULAIMAN, Suraya; (MY).
TAMSIR, Agus, Santoso; (MY).
MANUT, Azrif; (MY).
ALIAS, Dzuzlindah, Muhamad; (MY).
ZAIN, Azlina, Mohd; (MY)
Agent: SIAW, Timothy; Shearn Delamore & Co.. 7th Floor Wisma Hamzah-Kwon Hing No. 1, Leboh Ampang 50100 Kuala Lumpur (MY)
Priority Data:
PI 20083507 10.09.2008 MY
Title (EN) IMPROVED CAPACITIVE SENSOR AND METHOD FOR MAKING THE SAME
(FR) CAPTEUR CAPACITIF AMÉLIORÉ ET SON PROCÉDÉ DE FABRICATION
Abstract: front page image
(EN)The present invention relates to capacitive sensors for measuring humidity and moisture and to an improved process for making the same. The fabrication process for a capacitive sensor having a multi-layer electrodes for measuring humidity and moisture comprising disposing the multi-layer interdigitated electrodes in a multi-layer polyimides; providing a plurality of trenches on the surface of the electrode by lift off process; and covering the sensor with photosensitive negative polyimide.
(FR)L’invention concerne des capteurs capacitifs destinés à mesurer l’humidité et la teneur en eau, ainsi qu’un procédé de fabrication amélioré de ceux-ci. Le procédé de fabrication d’un capteur capacitif doté d’électrodes multicouches destiné à mesurer l’humidité et la teneur en eau comprend les étapes consistant à : placer les électrodes multicouches interdigitées dans des polyimides multicouches; ménager une pluralité de tranchées à la surface des électrodes au moyen d’un procédé de décollement; et recouvrir le capteur de polyimide négatif photosensible.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)