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1. WO2010029516 - A CAPACITIVE SENSOR DEVICE AND A METHOD OF SENSING ACCELERATIONS

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Publication Number WO/2010/029516
Publication Date 18.03.2010
International Application No. PCT/IB2009/054002
International Filing Date 14.09.2009
IPC
G01P 15/125 2006.1
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces
08with conversion into electric or magnetic values
125by capacitive pick-up
CPC
G01P 15/0802
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
0802Details
G01P 15/125
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
125by capacitive pick-up
G01P 2015/0814
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
0805being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
0808for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
0811for one single degree of freedom of movement of the mass
0814for translational movement of the mass, e.g. shuttle type
Applicants
  • NXP B.V. [NL]/[NL] (AllExceptUS)
  • LANGEREIS, Geert [NL]/[NL] (UsOnly)
Inventors
  • LANGEREIS, Geert
Agents
  • WILLIAMSON, Paul, L.
Priority Data
08105349.815.09.2008EP
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) A CAPACITIVE SENSOR DEVICE AND A METHOD OF SENSING ACCELERATIONS
(FR) DISPOSITIF CAPTEUR CAPACITIF ET PROCÉDÉ DE DÉTECTION D’ACCÉLÉRATIONS
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Abstract
(EN) The invention relates to a capacitive sensor device 100. The capacitive sensor device (100) comprises a substrate (401), a first electrode (101) coupled to the substrate (401, a second electrode (102) coupled to the substrate (401) and a movable element (103). The movable element (103) is capacitively coupled to the first electrode (101), the moveable element (103) and the first electrode (101) representing a first capacitor (104). The movable element (103) is capacitively coupled to the second electrode (102), the moveable element (103) and the second electrode (102) representing a second capacitor (105). The movable element (103) is movable between the first electrode (101) and the second electrode (102) in such a manner, that an electrical impedance between the first electrode (101) and the second electrode (102) is changeable due to a change of a position of the movable element (103). The movable element (103) is decoupled from the substrate (401), in particular to a signal line.
(FR) L’invention concerne un dispositif capteur capacitif (100), comprenant un substrat (401), une première électrode (101) reliée au substrat (401), une seconde électrode (102) reliée au substrat (401) et un élément mobile (103). L’élément mobile (103) est relié par capacité à la première électrode (101), l’élément mobile (103) et la première électrode (101) représentant un premier condensateur (104). L’élément mobile (103) est relié par capacité à la seconde électrode (102), l’élément mobile (103) et la seconde électrode (102) représentant un second condensateur (105). L’élément mobile (103) est mobile entre la première électrode (101) et la seconde électrode (102), un changement de position de l’élément mobile (103) se traduisant par une variation d’impédance électrique entre la première électrode (101) et la seconde électrode (102). L’élément mobile (103) est découplé du substrat (401), plus particulièrement vers une ligne de transmission de signaux.
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