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1. (WO2010029490) MEMS RESONATOR
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2010/029490    International Application No.:    PCT/IB2009/053899
Publication Date: 18.03.2010 International Filing Date: 07.09.2009
IPC:
H03H 9/02 (2006.01)
Applicants: NXP B.V. [NL/NL]; High Tech Campus 60 NL-5656 AG Eindhoven (NL) (For All Designated States Except US).
VAN BEEK, Jozef Thomas Martinus [NL/NL]; (GB) (For US Only).
VOGELS, Ronald [NL/NL]; (GB) (For US Only)
Inventors: VAN BEEK, Jozef Thomas Martinus; (GB).
VOGELS, Ronald; (GB)
Agent: WILLIAMSON, Paul, L.; (GB)
Priority Data:
08105284.7 09.09.2008 EP
Title (EN) MEMS RESONATOR
(FR) RÉSONATEUR MEMS
Abstract: front page image
A MEMS resonator comprises a resonator body (34), and an anchor (32) which provides a fixed connection between the resonator body (34) and a support body. A resistive heating element (R1,R2) and a feedback control system are used to maintain the resonator body (34) at a constant temperature. A location for thermally coupling the anchor (32) to the resistive heating element (R1,R2) is selected which has a lowest dependency of its temperature on the ambient temperature during the operation of the feedback control.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)