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1. (WO2010028154) FABRIC CONTAINING NON-CRIMPED FIBERS AND METHODS OF MANUFACTURE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2010/028154    International Application No.:    PCT/US2009/055896
Publication Date: 11.03.2010 International Filing Date: 03.09.2009
IPC:
B24D 11/00 (2006.01), B32B 27/04 (2006.01)
Applicants: INNOPAD, INC. [US/US]; 6 Centennial Drive Peabody, MA 01960 (US) (For All Designated States Except US).
HSU, Oscar K. [US/US]; (US) (For US Only).
LEFEVRE, Paul [FR/US]; (US) (For US Only)
Inventors: HSU, Oscar K.; (US).
LEFEVRE, Paul; (US)
Agent: GROSSMAN, Steven J.; (US)
Priority Data:
61/094,345 04.09.2008 US
Title (EN) FABRIC CONTAINING NON-CRIMPED FIBERS AND METHODS OF MANUFACTURE
(FR) TISSU CONTENANT DES FIBRES NON FRISÉES ET PROCÉDÉS DE FABRICATION ASSOCIÉS
Abstract: front page image
(EN)A chemical-mechanical planarization pad for semiconductor manufacturing is provided. The pad comprises synthetic fibers that are non-crimped fibers which are present in an amount o-f 1.0 % by weight to 98.0 % by weight in the mat and wherein the non-crimped fibers have a length of 0.1 cm to 127 cm and a diameter of 1.0 to 1000 micrometers.
(FR)L'invention porte sur un tampon de planarisation chimico-mécanique destiné à la fabrication de semi-conducteur. Le tampon comprend des fibres synthétiques qui sont des fibres non frisées, présentes dans une quantité de 1,0 % en poids à 98,0 % en poids dans le mat, les fibres non frisées ayant une longueur de 0,1 cm à 127 cm et un diamètre de 1,0 à 1 000 micromètres.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)