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Machine translation
1. (WO2010026879) GAS SUPPLY MEMBER AND PLASMA PROCESSING DEVICE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2010/026879    International Application No.:    PCT/JP2009/064521
Publication Date: 11.03.2010 International Filing Date: 19.08.2009
Chapter 2 Demand Filed:    28.06.2010    
IPC:
H01L 21/3065 (2006.01), C23C 16/455 (2006.01), H01L 21/205 (2006.01)
Applicants: TOKYO ELECTRON LIMITED [JP/JP]; 3-1, Akasaka 5-chome, Minato-ku, Tokyo 1076325 (JP) (For All Designated States Except US).
SUDOU, Kenji [JP/JP]; (JP) (For US Only).
MIHARA, Naoki [JP/JP]; (JP) (For US Only)
Inventors: SUDOU, Kenji; (JP).
MIHARA, Naoki; (JP)
Agent: ITOH, Hidehiko; IMY INTERNATIONAL PATENT OFFICE, Oriental Sakaisuji Bldg., 21-19, Shimanouchi 1-chome, Chuo-ku, Osaka-shi, Osaka 5420082 (JP)
Priority Data:
2008-226238 03.09.2008 JP
Title (EN) GAS SUPPLY MEMBER AND PLASMA PROCESSING DEVICE
(FR) ÉLÉMENT D'ALIMENTATION EN GAZ ET DISPOSITIF DE TRAITEMENT PAR PLASMA
(JA) ガス供給部材およびプラズマ処理装置
Abstract: front page image
(EN)A gas supply member (11) includes an annular section (12) having an annularly extending gas flow path provided inside the annular section. The annular section (12) is provided with an annular first member (13a) including a flat plate section (18) having gas supply holes (19) formed in the flat plate section, and also with an annular second member (13b) for forming a space (14), which is the gas flow path, between the second member (13b) and the first member (13a).
(FR)L'invention porte sur un élément d'alimentation en gaz (11) qui comprend une section annulaire (12) au sein de laquelle un trajet d'écoulement de gaz s'étend de façon annulaire. La section annulaire (12) comporte un premier élément annulaire (13a) comprenant une section de plaque plate (18) pourvue de trous d'alimentation en gaz (19) qui y sont formés, et comporte également un second élément annulaire (13b) pour former un espace (14), qui est le trajet d'écoulement de gaz, entre le second élément (13b) et le premier élément (13a).
(JA) ガス供給部材11は、環状に延びるガスの流路がその内部に設けられた環状部12を含む。環状部12は、ガスを供給する複数の供給孔19が設けられた平板部18を含む環状の第一の部材13aと、第一の部材13aとの間にガスの流路となる空間14を形成する環状の第二の部材13bとを備える。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)