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1. WO2010025847 - DEVICE AND METHOD FOR MEASURING A SURFACE

Publication Number WO/2010/025847
Publication Date 11.03.2010
International Application No. PCT/EP2009/006108
International Filing Date 22.08.2009
IPC
G01B 11/00 2006.1
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
G01B 11/24 2006.1
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01S 17/89 2006.1
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
88Lidar systems, specially adapted for specific applications
89for mapping or imaging
CPC
G01B 11/002
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
002for measuring two or more coordinates
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01S 17/10
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
02Systems using the reflection of electromagnetic waves other than radio waves
06Systems determining position data of a target
08for measuring distance only
10using transmission of interrupted, pulse-modulated waves
G01S 2013/466
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
13Systems using the reflection or reradiation of radio waves, e.g. radar systems; Analogous systems using reflection or reradiation of waves whose nature or wavelength is irrelevant or unspecified
02Systems using reflection of radio waves, e.g. primary radar systems; Analogous systems
06Systems determining position data of a target
46Indirect determination of position data
466by Trilateration, i.e. two antennas or two sensors determine separately the distance to a target, whereby with the knowledge of the baseline length, i.e. the distance between the antennas or sensors, the position data of the target is determined
G01S 7/4817
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
7Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
48of systems according to group G01S17/00
481Constructional features, e.g. arrangements of optical elements
4817relating to scanning
Applicants
  • CARL ZEISS AG [DE]/[DE] (AllExceptUS)
  • ALVAREZ DIEZ, Cristina [ES]/[DE] (UsOnly)
  • HÖLLER, Frank [DE]/[DE] (UsOnly)
  • SPRUCK, Bernd [DE]/[DE] (UsOnly)
  • TREMONT, Marc [LU]/[DE] (UsOnly)
Inventors
  • ALVAREZ DIEZ, Cristina
  • HÖLLER, Frank
  • SPRUCK, Bernd
  • TREMONT, Marc
Common Representative
  • CARL ZEISS AG [DE]/[DE]
Priority Data
10 2008 045 387.002.09.2008DE
Publication Language German (de)
Filing Language German (DE)
Designated States
Title
(DE) VORRICHTUNG UND VERFAHREN ZUM VERMESSEN EINER OBERFLÄCHE
(EN) DEVICE AND METHOD FOR MEASURING A SURFACE
(FR) PROCÉDÉ ET DISPOSITIF DE MESURE D'UNE SURFACE
Abstract
(DE) Eine Vorrichtung zum Vermessen einer Oberfläche (2) umfasst eine Lichtquelle (3), eine Lichtlenkeinrichtung (4-6), eine Detektoranordnung (10) und eine Auswerte- Schaltung (15). Die Lichtquelle (3) erzeugt eine Folge von Lichtpulsen mit einer Repetitionsrate. Die Lichtlenkeinrichtung (4-6) ist kontrollierbar, um die Folge von Lichtpulsen auf einen Oberflächenbereich (25) der Oberfläche (2) zu lenken. Der Oberflächenbereich kann aus mehreren Oberflächenbereichen (25, 27) ausgewählt werden. Die Detektoranordnung ist eingerichtet, um wenigstens ein von dem Oberflächenbereich (25) gestreutes und/oder reflektiertes Lichtsignal (21 -24) zu empfangen. Die Auswerteschaltung (15) ist mit der Detektoranordnung (10) gekoppelt und eingerichtet, um zum Bestimmen einer Position des Oberflächenbereichs (25) eine Phasendifferenz zwischen einem aus der Folge von Lichtpulsen abgeleiteten Referenzsignal (19) und einer Signalkomponente des wenigstens einen Lichtsignals (21 -24) zu ermittein. Dabei wird die Phasendifferenz für die Signalkomponente ermittelt, die eine Frequenz aufweist, die einem Vielfachen der Repetitionsrate entspricht.
(EN) A device for measuring surface (2) comprises a light source (3), a light guiding device (4-6), a detector system (10) and an evaluation circuit (15). The light source (3) generates a sequence of light pulses having a repetition rate. The light guiding device (4-6) can be controlled to guide the sequence of light pulses onto a surface area (25) of the surface (2). The surface area can be selected from a plurality of surface areas (25, 27). The detector system is adapted to receive at least one light signal (21-24) which is scattered and/or reflected by the surface area (25). The evaluation circuit (15) is coupled to the detector system (10) and is adapted to determine a phase difference between the reference signal (19) derived from the sequence of light pulses and a signal component of the at least one light signal (21-24) to determine a position of the surface area (25). The phase difference is determined for the signal component having a frequency that corresponds to a multiple of the repetition rate.
(FR) L'invention concerne un dispositif de mesure d'une surface (2), comportant une source de lumière (3), un dispositif d'orientation de lumière (4-9), un dispositif de détection (10) et un circuit d'évaluation (15). La source de lumière (3) génère une suite d'impulsions lumineuses à un taux de répétition donné. Le dispositif d'orientation de lumière (4-9) est commandé pour diriger la suite d'impulsions lumineuses sur une zone superficielle (25) de ladite surface (2), cette zone superficielle pouvant être sélectionnée parmi une pluralité de zones superficielles (25,27). Le dispositif de détection (13, 14) est conçu pour recevoir au moins un signal lumineux (21-24) réfléchi et/ou diffusé par la zone superficielle (25). Le circuit d'évaluation (15) est couplé au dispositif de détection (10) et conçu pour déterminer une différence de phase (67) entre un signal de référence (19) résultant de la suite d'impulsions lumineuses et une composante du ou des signaux lumineux (21-24), pour la détermination d'une position de la zone superficielle (25). La différence de phase est alors déterminée pour la composante de signal qui présente une fréquence correspondant à un multiple du taux de répétition.
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