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Machine translation
1. (WO2010025228) METHOD AND APPARATUS FOR EXTENDED TEMPERATURE PYROMETRY
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2010/025228    International Application No.:    PCT/US2009/055162
Publication Date: 04.03.2010 International Filing Date: 27.08.2009
IPC:
H01L 21/324 (2006.01), H01L 21/66 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, CA 95054 (US) (For All Designated States Except US).
HUNTER, Aaron, M. [US/US]; (US) (For US Only).
LI, Jiping [US/US]; (US) (For US Only).
RAMANUJAM, Rajesh, S. [IN/US]; (US) (For US Only).
HAW, Thomas [US/US]; (US) (For US Only)
Inventors: HUNTER, Aaron, M.; (US).
LI, Jiping; (US).
RAMANUJAM, Rajesh, S.; (US).
HAW, Thomas; (US)
Agent: SERVILLA, Scott, S.; Diehl Servilla LLC 33 Wood Ave South Second Floor, Suite 210 Iselin, New Jersey 08830 (US)
Priority Data:
61/092,964 29.08.2008 US
61/112,477 07.11.2008 US
12/547,605 26.08.2009 US
Title (EN) METHOD AND APPARATUS FOR EXTENDED TEMPERATURE PYROMETRY
(FR) PROCÉDÉ ET APPAREIL POUR LA PYROMÉTRIE DE TEMPÉRATURE ÉTENDUE
Abstract: front page image
(EN)Embodiments of the invention are directed to methods and apparatus for rapid thermal processing of a substrate over an extended temperature range, including low temperatures. Systems and methods for using an extended temperature pyrometry system employing a transmitted radiation detector system are disclosed. Systems combining transmitted radiation detector systems and emitted radiation detector systems are also described.
(FR)Les modes de réalisation de la présente invention concernent des procédés et un appareil pour le traitement thermique rapide d’un substrat sur une gamme étendue de températures, comprenant les basses températures. Des systèmes et des procédés pour l’utilisation d’un système pyrométrique de température étendue utilisant un système de détection des radiations transmises sont décrits. Des systèmes combinant des systèmes de détection des radiations transmises et des systèmes de détection des radiations émises sont également décrits.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)