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Machine translation
1. (WO2010025003) STRUCTURED ABRASIVE ARTICLE, METHOD OF MAKING THE SAME, AND USE IN WAFER PLANARIZATION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2010/025003    International Application No.:    PCT/US2009/052188
Publication Date: 04.03.2010 International Filing Date: 30.07.2009
IPC:
H01L 21/304 (2006.01)
Applicants: 3M INNOVATIVE PROPERTIES COMPANY [US/US]; 3M Center Post Office Box 33427 Saint Paul, MN 55133-3427 (US) (For All Designated States Except US)
Inventors: JOSEPH, William, D.; (US).
QIAN, Julie, Y.; (US).
BARAN, Jimmie, R., Jr.; (US).
GAGLIARDI, John, J.; (US)
Agent: WRIGHT, Bradford, B.; (US)
Priority Data:
61/092,521 28.08.2008 US
Title (EN) STRUCTURED ABRASIVE ARTICLE, METHOD OF MAKING THE SAME, AND USE IN WAFER PLANARIZATION
(FR) ARTICLE ABRASIF STRUCTURÉ, SON PROCÉDÉ DE FABRICATION ET UTILISATION DANS LA PLANARISATION DE PLAQUETTES
Abstract: front page image
(EN)A structured abrasive article comprises an at least translucent film backing and an abrasive layer disposed on the backing. The abrasive layer comprises a plurality of shaped abrasive composites. The shaped abrasive composites comprise abrasive particles dispersed in a binder. The abrasive particles consist essentially of ceria particles having an average primary particle size of less than 100 nanometers. The binder comprises a polyether acid and a reaction product of components comprising a carboxylic (meth)acrylate and a poly(meth)acrylate, and, based on a total weight of the abrasive layer, the abrasive particles are present in an amount of at least 70 percent by weight. Methods of making and using the structured abrasive article are also disclosed.
(FR)La présente invention concerne un article abrasif structuré qui comprend au moins une couche arrière en film translucide et une couche abrasive disposée sur la couche arrière. La couche abrasive comprend une pluralité de composites abrasifs formés. Les composites abrasifs formés comprennent des particules abrasives dispersées dans un liant. Les particules abrasives consistent sensiblement en particules d’oxyde de cérium ayant une taille de particule principale moyenne inférieure à 100 nanomètres. Le liant comprend un acide de polyéther et un produit réactionnel de composants comprenant un (méth)acrylate et un poly(méth)acrylate carboxyliques et, sur la base du poids total de la couche abrasive, les particules abrasives sont présentes en une quantité d’au moins 70 pour cent en poids. L’invention concerne également des procédés de fabrication et d’utilisation de l’article abrasif structuré.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)